Abstract: A lanthanoid-containing inorganic material fine particle having a function of converting a wavelength of light to a shorter wavelength, the lanthanoid-containing inorganic material fine particle including: a core particle; and a shell layer, the core particle containing a lanthanoid having a light-absorbing function and a lanthanoid having a light-emitting function, the shell layer including at least an outer shell containing a rare earth element, the total amount of the lanthanoid having a light-absorbing function and the lanthanoid having a light-emitting function in the outer shell being 2 mol % or less based on the amount of the rare earth element contained in the outer shell, the outer shell having a thickness of 2 to 20 nm, the core particle and the shell layer having no interface at a contact face to form a continuous body.

Abstract: A lanthanoid-containing inorganic material fine particle having a function of converting a wavelength of light to a shorter wavelength, the lanthanoid-containing inorganic material fine particle including: a core particle; and a shell layer, the core particle containing a lanthanoid having a light-absorbing function and a lanthanoid having a light-emitting function, the shell layer including at least an outer shell containing a rare earth element, the total amount of the lanthanoid having a light-absorbing function and the lanthanoid having a light-emitting function in the outer shell being 2 mol % or less based on the amount of the rare earth element contained in the outer shell, the outer shell having a thickness of 2 to 20 nm, the core particle and the shell layer having no interface at a contact face to form a continuous body.

Abstract: An object of the present invention is to provide the X-ray tube which improves the workability of the baking for obtaining the ultra-high vacuum of the X-ray tube having a field emission type electron gun and have a stable performance. The X-ray tube comprises a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump, in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to the electromagnetic lens section in the X-ray tube, thereby it is possible to perform the baking by removing only the vacuum tube section. The fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section, and therefore it is a constitution to easily perform an optical axis alignment at a mounting time after the baking.

Abstract: An object of the present invention is to provide the X-ray tube which improves the workability of the baking for obtaining the ultra-high vacuum of the X-ray tube having a field emission type electron gun and have a stable performance. The X-ray tube comprises a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump, in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to the electromagnetic lens section in the X-ray tube, thereby it is possible to perform the baking by removing only the vacuum tube section. The fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section, and therefore it is a constitution to easily perform an optical axis alignment at a mounting time after the baking.

Abstract: An inner container is to be installed inside an outer container, the inner container including a jointed portion configured to joint a jointing portion formed in the outer container to prevent the inner container from being separated from the outer container when the inner container is installed in the outer container; and a second engaging portion engaged with a first engaging portion formed in the outer container and configured to prevent the inner container from rotating relative to the outer container.

Abstract: An X-ray tube and an X-ray inspection apparatus using the X-ray tube have improved workability of the baking for obtaining an ultra-high vacuum of the X-ray tube having a field emission type electron gun, and have stable performance. The X-ray tube includes a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to an electromagnetic lens section in the X-ray tube. It is thereby possible to perform the baking by removing only the vacuum tube section. Fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section to easily perform an optical axis alignment at a mounting time after the baking.

Abstract: An inner container is to be installed inside an outer container, the inner container including a jointed portion configured to joint a jointing portion formed in the outer container to prevent the inner container from being separated from the outer container when the inner container is installed in the outer container; and a second engaging portion engaged with a first engaging portion formed in the outer container and configured to prevent the inner container from rotating relative to the outer container.

Abstract: A chemical amplifying type positive resist composition which provides a resist pattern having an exceedingly improved line edge roughness, and is excellent in various resist performances such as dry etching resistance, sensitivity and resolution; and comprises: (A) an acid generator containing (a) a sulfonium salt represented by the following formula (I):  wherein Q1 and Q2 is alkyl or a cycloalkyl, or Q1 and Q2 form, together with a sulfur atom to which Q1 and Q2 are adjacent, an heteroalicyclic group; Q3 represents a hydrogen atom, Q4 represents alkyl or a cycloalkyl, or Q3 and Q4 form, together with a CHC(O) group to which Q3 and Q4 are adjacent, a 2-oxocycloalkyl group; and Q5SO3− represents an organosulfonate ion, and (b) at least one onium salt selected from a triphenylsulfonium salt represented by the following formula (IIa), and a diphenyliodonium salt represented by the following formula (IIb):  wherein P1 to P5 represent hydrogen, a hydroxyl group

Abstract: A chemical amplification type positive resist composition which is good in resolution, provide a good pattern profile under exposure using light of wavelength of 220 nm or shorter even when applied on a basic substrate or a low reflectance substrate and which comprises an acid generator comprising an aliphatic sulfonium salt represented by the following formula (I): wherein Q1 represents an alkyl group, Q2 represents an alkyl or a residue of an alicyclic hydrocarbon and m represents an integer of 1 to 8; and onium salt selected from triphenylsulfonium salts represented by the following formula (IIa) and diphenyliodonium salts represented by the following formula (IIb): wherein Q3, Q4, Q5, Q6 and Q7each independently represent a hydrogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, and q and p represent a integer of 4 to 8; and (2) a resin which has a polymerization unit with a group unstable to an acid, and i

Abstract: A chemical amplifying type positive resist composition which provides a resist pattern having an exceedingly improved line edge roughness, and is excellent in various resist performances such as dry etching resistance, sensitivity and resolution; and comprises: