Abstract: An object tracking device that can track an object accurately and consistently is provided. An object tracking device (20) includes an input interface (21), a processor (23), and an output interface (24). The input interface (21) is configured to acquire sensor data. The processor (23) is configured to detect a detection target from the sensor data and track the detection target using Kalman filters associated with each of the detection target and an observed value. The output interface (24) is configured to output a detection result regarding the detection target. The processor (23) is configured to impose a limit on a range of variation in an index of the Kalman filters that influences tracking of the detection target.

Abstract: In an ultrasonic inspection performed on an inspection object including a fine and multi-layer structure such as a semiconductor wafer and a MEMS wafer, a defect is detected by: separating a defect present inside from a normal pattern; obtaining an image of the inspection object by imaging the inspection object having a pattern formed thereon to enable a highly sensitive detection; generating a reference image that does not include a defect from the obtained image of the inspection object; generating a multi-value mask for masking a non-defective pixel from the obtained image of the inspection object; calculating a defect accuracy by matching the brightness of the image of the inspection object and the reference image; and comparing the calculated defect accuracy with the generated multi-value mask.

Abstract: In an ultrasonic inspection performed on an inspection object including a fine and multi-layer structure such as a semiconductor wafer and a MEMS wafer, a defect is detected by: separating a defect present inside from a normal pattern; obtaining an image of the inspection object by imaging the inspection object having a pattern formed thereon to enable a highly sensitive detection; generating a reference image that does not include a defect from the obtained image of the inspection object; generating a multi-value mask for masking a non-defective pixel from the obtained image of the inspection object; calculating a defect accuracy by matching the brightness of the image of the inspection object and the reference image; and comparing the calculated defect accuracy with the generated multi-value mask.

Abstract: In an ultrasonic inspection performed on an inspection object including a fine and multi-layer structure such as a semiconductor wafer and a MEMS wafer, a defect is detected by: separating a defect present inside from a normal pattern; obtaining an image of the inspection object by imaging the inspection object having a pattern formed thereon to enable a highly sensitive detection; generating a reference image that does not include a defect from the obtained image of the inspection object; generating a multi-value mask for masking a non-defective pixel from the obtained image of the inspection object; calculating a defect accuracy by matching the brightness of the image of the inspection object and the reference image; and comparing the calculated defect accuracy with the generated multi-value mask.

Abstract: In an ultrasonic inspection performed on an inspection object including a fine and multi-layer structure such as a semiconductor wafer and a MEMS wafer, a defect is detected by: separating a defect present inside from a normal pattern; obtaining an image of the inspection object by imaging the inspection object having a pattern formed thereon to enable a highly sensitive detection; generating a reference image that does not include a defect from the obtained image of the inspection object; generating a multi-value mask for masking a non-defective pixel from the obtained image of the inspection object; calculating a defect accuracy by matching the brightness of the image of the inspection object and the reference image; and comparing the calculated defect accuracy with the generated multi-value mask.

Abstract: In an ultrasonic inspection performed on an inspection object including a fine and multi-layer structure such as a semiconductor wafer and a MEMS wafer, a defect is detected by: separating a defect present inside from a normal pattern; obtaining an image of the inspection object by imaging the inspection object having a pattern formed thereon to enable a highly sensitive detection; generating a reference image that does not include a defect from the obtained image of the inspection object; generating a multi-value mask for masking a non-defective pixel from the obtained image of the inspection object; calculating a defect accuracy by matching the brightness of the image of the inspection object and the reference image; and comparing the calculated defect accuracy with the generated multi-value mask.

Abstract: A variable optical attenuator in which a polarization beam splitter splits a beam incoming from the front into two linearly-polarized beams perpendicular to each other and separately outputs them to the back along first and second light paths. A Faraday rotator rotates a polarization plane of the two incoming linearly-polarized beams to an arbitrary angle by controlling a magnetic field to be applied to a Faraday element by a magnetism applying means and outputs them to the back. First and second analyzers arranged in the first and the second light paths and parallelly arranged perpendicular to these light paths are arranged in that order. The two analyzers have optical axes perpendicular to each other so that the optical axes are in the same direction as that of the polarization plane of the two linearly-polarized beams output from the polarization beam splitter.

Abstract: A laser diode capable of reducing a radiating angle ?? in the vertical direction, an optical pickup device, an optical disk apparatus, and optical communications equipment, all equipped with the laser diode which increases optical coupling efficiency. It has a first cladding layer of the first conductive type formed on a substrate, with an active layer on top of the first cladding layer and a second cladding layer of the second conductive type on top of the active layer. In at least the first or second cladding layer, it is formed of at least one optical guide layer having a higher refractive index than the first or second cladding layer and operating to expand a beam waist in the waveguide. This operation contributes to widening a region in which to shut up light, enabling a radiating angle ?? in the vertical direction to be reduced.

Abstract: A variable optical attenuator in which a polarization beam splitter splits a beam incoming from the front into two linearly-polarized beams perpendicular to each other and separately outputs them to the back along first and second light paths. A Faraday rotator rotates a polarization plane of the two incoming linearly-polarized beams to an arbitrary angle by controlling a magnetic field to be applied to a Faraday element by a magnetism applying means and outputs them to the back. First and second analyzers arranged in the first and the second light paths and parallelly arranged perpendicular to these light paths are arranged in that order. The two analyzers have optical axes perpendicular to each other so that the optical axes are in the same direction as that of the polarization plane of the two linearly-polarized beams output from the polarization beam splitter.

Abstract: A laser diode capable of reducing a radiating angle ?? in the vertical direction, an optical pickup device, an optical disk apparatus, and optical communications equipment, all equipped with the laser diode which increases optical coupling efficiency. It has a first cladding layer of the first conductive type formed on a substrate, with an active layer on top of the first cladding layer and a second cladding layer of the second conductive type on top of the active layer. In at least the first or second cladding layer, it is formed of at least one optical guide layer having a higher refractive index than the first or second cladding layer and operating to expand a beam waist in the waveguide. This operation contributes to widening a region in which to shut up light, enabling a radiating angle ?? in the vertical direction to be reduced.

Abstract: A laser diode capable of reducing a radiating angle ?? in the vertical direction, an optical pickup device, an optical disk apparatus, and optical communications equipment, all equipped with the laser diode which increases optical coupling efficiency. It has a first cladding layer of the first conductive type formed on a substrate, with an active layer on top of the first cladding layer and a second cladding layer of the second conductive type on top of the active layer. In at least the first or second cladding layer, it is formed of at least one optical guide layer having a higher refractive index than the first or second cladding layer and operating to expand a beam waist in the waveguide. This operation contributes to widening a region in which to shut up light, enabling a radiating angle ?? in the vertical direction to be reduced.

Abstract: A variable optical attenuator comprising a separation/combination birefringent element, fixed polarization rotation means, a convex lens, variable polarization rotation means, and a mirror which are arranged in that order. The fixed polarization rotation means has a compensation film Faraday element placed in a cylindrical permanent magnet, and the variable polarization rotation means has a base film Faraday element that is placed outside the cylindrical permanent magnet, and an electromagnet applying a variable magnetic field thereto. Thereby, both the Faraday elements are magnetized in directions different from each other.

Abstract: In an optical head device, a light emission source for emitting a plurality of laser beams with different wavelengths and an optical system including an objective lens and a collimator are provided. With respect to the optical system to be used in common for a plurality of optical recording media of different kinds, the RIM intensity is set to be not less than 0.1 and the magnification is set in the range of 4 to 6. With these conditions applied to the RIM intensity and the magnification of the optical system, light utilization efficiency at the time of CD recording is ensured, while preventing this from adversely affecting DVD reproduction or recording and while ensuring a beam spot quality.

Abstract: A variable optical attenuator comprising a separation/combination birefringent element, fixed polarization rotation means, a convex lens, variable polarization rotation means, and a mirror which are arranged in that order. The fixed polarization rotation means has a compensation film Faraday element placed in a cylindrical permanent magnet, and the variable polarization rotation means has a base film Faraday element that is placed outside the cylindrical permanent magnet, and an electromagnet applying a variable magnetic field thereto. Thereby, both the Faraday elements are magnetized in directions different from each other.

Abstract: A laser diode capable of reducing a radiating angle ?? in the vertical direction, an optical pickup device, an optical disk apparatus, and optical communications equipment, all equipped with the laser diode which increases optical coupling efficiency. It has a first cladding layer of the first conductive type formed on a substrate, with an active layer on top of the first cladding layer and a second cladding layer of the second conductive type on top of the active layer. In at least the first or second cladding layer, it is formed of at least one optical guide layer having a higher refractive index than the first or second cladding layer and operating to expand a beam waist in the waveguide. This operation contributes to widening a region in which to shut up light, enabling a radiating angle ?? in the vertical direction to be reduced.

Abstract: A laser diode capable of reducing a radiating angle ?? in the vertical direction, an optical pickup device, an optical disk apparatus, and optical communications equipment, all equipped with the laser diode which increases optical coupling efficiency. It has a first cladding layer of the first conductive type formed on a substrate, with an active layer on top of the first cladding layer and a second cladding layer of the second conductive type on top of the active layer. In at least the first or second cladding layer, it is formed of at least one optical guide layer having a higher refractive index than the first or second cladding layer and operating to expand a beam waist in the waveguide. This operation contributes to widening a region in which to shut up light, enabling a radiating angle ?? in the vertical direction to be reduced.

Abstract: In an optical head device, a light emission source for emitting a plurality of laser beams with different wavelengths and an optical system including an objective lens and a collimator are provided. With respect to the optical system to be used in common for a plurality of optical recording media of different kinds, the RIM intensity is set to be not less than 0.1 and the magnification is set in the range of 4 to 6. With these conditions applied to the RIM intensity and the magnification of the optical system, light utilization efficiency at the time of CD recording is ensured, while preventing this from adversely affecting DVD reproduction or recording and while ensuring a beam spot quality.

Abstract: A laser diode capable of reducing a radiating angle &thgr;⊥ in the vertical direction, an optical pickup device, an optical disk apparatus, and optical communications equipment, all equipped with the laser diode which increases optical coupling efficiency. It has a first cladding layer of the first conductive type formed on a substrate, with an active layer on top of the first cladding layer and a second cladding layer of the second conductive type on top of the active layer. In at least the first or second cladding layer, it is formed of at least one optical guide layer having a higher refractive index than the first or second cladding layer and operating to expand a beam waist in the waveguide. This operation contributes to widening a region in which to shut up light, enabling a radiating angle &thgr;⊥ in the vertical direction to be reduced.

Abstract: A semiconductor laser comprises: a substrate, a first cladding layer on the substrate, an active layer on the first cladding layer, a second cladding layer on the active layer; and the second cladding layer has a plurality of steps of equivalent complex index of refraction disposed to be parallel to p-n junction direction and to be perpendicular to a cavity direction. In an optical pickup device using a semiconductor laser as a light source thereof, the semiconductor laser comprises: a substrate, a first cladding layer on the substrate, an active layer on the first cladding layer, a second cladding layer on the active layer; and the second cladding layer has a plurality of equivalent complex index of refraction disposed to be parallel to p-n junction direction and to be perpendicular to a cavity direction.

Abstract: A semiconductor laser device having light output monitoring light-receiving portion can be fabricated monolithically. A semiconductor laser element (LD) composed of a first cladding layer (22), an active layer (23) and a second cladding layer (24) is formed on a semiconductor substrate (21). A light-receiving portion (PD.sub.1) of a pn junction is formed on the semiconductor substrate (21) disposed behind the semiconductor laser element (LD) by diffusion or selective growth.