Patents by Inventor Kenji Sawamura

Kenji Sawamura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10083983
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a charge storage film, and at least one columnar member. The stacked body is provided on the substrate. In the stacked body, a plurality of insulating films and a plurality of electrode films are layered together alternately. The semiconductor pillar is provided in the stacked body and extends in a stacking direction of the stacked body. The charge storage film is provided between the semiconductor pillar and the stacked body. The columnar member is provided in the stacked body and extends in the stacking direction. A lower portion of the columnar member is provided in the substrate.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: September 25, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Kotaro Noda, Kyoko Noda, Aya Minemura, Kenji Sawamura
  • Publication number: 20170294446
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a charge storage film, and at least one columnar member. The stacked body is provided on the substrate. In the stacked body, a plurality of insulating films and a plurality of electrode films are layered together alternately. The semiconductor pillar is provided in the stacked body and extends in a stacking direction of the stacked body. The charge storage film is provided between the semiconductor pillar and the stacked body. The columnar member is provided in the stacked body and extends in the stacking direction. A lower portion of the columnar member is provided in the substrate.
    Type: Application
    Filed: June 22, 2017
    Publication date: October 12, 2017
    Applicant: Toshiba Memory Corporation
    Inventors: Kotaro NODA, Kyoko Noda, Aya Minemura, Kenji Sawamura
  • Patent number: 9711527
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a charge storage film, and at least one columnar member. The stacked body is provided on the substrate. In the stacked body, a plurality of insulating films and a plurality of electrode films are layered together alternately. The semiconductor pillar is provided in the stacked body and extends in a stacking direction of the stacked body. The charge storage film is provided between the semiconductor pillar and the stacked body. The columnar member is provided in the stacked body and extends in the stacking direction. A lower portion of the columnar member is provided in the substrate.
    Type: Grant
    Filed: February 19, 2016
    Date of Patent: July 18, 2017
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kotaro Noda, Kyoko Noda, Aya Minemura, Kenji Sawamura
  • Patent number: 9633741
    Abstract: An embodiment comprises: a plurality of stacked bodies, each of the stacked bodies including a plurality of control gate electrodes stacked in a first direction, the stacked bodies extending in a second direction intersecting the first direction; an insulating isolation layer disposed between a pair of the stacked bodies adjacent in a third direction intersecting the first direction and the second direction, the insulating isolation layer extending in the second direction; a plurality of semiconductor layers, each of the semiconductor layers extending in the first direction and having its side surface covered by the plurality of control gate electrodes, the semiconductor layers being disposed in a plurality of columns in one of the plurality of stacked bodies; a memory cell disposed between the control gate electrode and the semiconductor layer, the memory cell including a charge accumulation layer; a plurality of bit lines each connected to one end of the semiconductor layer, the bit lines extending in the t
    Type: Grant
    Filed: September 19, 2016
    Date of Patent: April 25, 2017
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Michiaki Matsuo, Kenji Sawamura
  • Publication number: 20170077127
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a charge storage film, and at least one columnar member. The stacked body is provided on the substrate. In the stacked body, a plurality of insulating films and a plurality of electrode films are layered together alternately. The semiconductor pillar is provided in the stacked body and extends in a stacking direction of the stacked body. The charge storage film is provided between the semiconductor pillar and the stacked body. The columnar member is provided in the stacked body and extends in the stacking direction. A lower portion of the columnar member is provided in the substrate.
    Type: Application
    Filed: February 19, 2016
    Publication date: March 16, 2017
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Kotaro NODA, Kyoko Noda, Aya Minemura, Kenji Sawamura
  • Publication number: 20150357042
    Abstract: According to an embodiment, a nonvolatile semiconductor memory device comprises a memory cell array and a control circuit. The memory cell array includes a plurality of memory cell layers that are stacked. Each memory cell layer comprises a plurality of memory cells formed on a semiconductor layer. The plurality of memory cell layers include: a first memory cell layer where the semiconductor layer is configured of monocrystalline silicon; and a second memory cell layer where the semiconductor layer is configured of polycrystalline silicon. The control circuit, when controlling write or read of data to/from a memory cell belonging to the first memory cell layer, performs control based on a first parameter, and when controlling write or read of data to/from a memory cell belonging to the second memory cell layer, performs control based on a second parameter that differs from the first parameter.
    Type: Application
    Filed: August 19, 2015
    Publication date: December 10, 2015
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Kenji SAWAMURA
  • Patent number: 9147472
    Abstract: According to an embodiment, a nonvolatile semiconductor memory device comprises a memory cell array and a control circuit. The memory cell array includes a plurality of memory cell layers that are stacked. Each memory cell layer comprises a plurality of memory cells formed on a semiconductor layer. The plurality of memory cell layers include: a first memory cell layer where the semiconductor layer is configured of monocrystalline silicon; and a second memory cell layer where the semiconductor layer is configured of polycrystalline silicon. The control circuit, when controlling write or read of data to/from a memory cell belonging to the first memory cell layer, performs control based on a first parameter, and when controlling write or read of data to/from a memory cell belonging to the second memory cell layer, performs control based on a second parameter that differs from the first parameter.
    Type: Grant
    Filed: October 23, 2013
    Date of Patent: September 29, 2015
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Kenji Sawamura
  • Publication number: 20150049551
    Abstract: According to an embodiment, a nonvolatile semiconductor memory device comprises a memory cell array and a control circuit. The memory cell array includes a plurality of memory cell layers that are stacked. Each memory cell layer comprises a plurality of memory cells formed on a semiconductor layer. The plurality of memory cell layers include: a first memory cell layer where the semiconductor layer is configured of monocrystalline silicon; and a second memory cell layer where the semiconductor layer is configured of polycrystalline silicon. The control circuit, when controlling write or read of data to/from a memory cell belonging to the first memory cell layer, performs control based on a first parameter, and when controlling write or read of data to/from a memory cell belonging to the second memory cell layer, performs control based on a second parameter that differs from the first parameter.
    Type: Application
    Filed: October 23, 2013
    Publication date: February 19, 2015
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Kenji SAWAMURA
  • Patent number: 8751888
    Abstract: A control circuit performs a write operation to 1-page memory cells along the selected word line, by applying a write pulse voltage to a selected word line, and then performs a verify read operation of confirming whether the data write is completed. When the data write is not completed, a step-up operation is performed of raising the write pulse voltage by a certain step-up voltage. A bit scan circuit determines whether the number of memory cells determined to reach a certain threshold voltage is equal to or more than a certain number among the memory cells read at the same time, according to read data held in the sense amplifier circuit as a result of the verify read operation. The control circuit changes the amount of the step-up voltage according to the determination of the bit scan circuit.
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: June 10, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takeshi Kamigaichi, Kenji Sawamura
  • Publication number: 20140036592
    Abstract: A semiconductor storage device has a memory cell array including memory cells and a plurality of redundancy regions arranged in a first direction including flag cells, plural word lines extending in the first direction, and plural bit lines extending in a second direction crossing the first direction, and a controller configured to control writing of data to the memory cells and also to the flag cells.
    Type: Application
    Filed: February 27, 2013
    Publication date: February 6, 2014
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Haruo MIKI, Kenji SAWAMURA, Koki UENO
  • Patent number: 8624314
    Abstract: According to one embodiment, a semiconductor device comprises an active area extending in a first direction, a contact plug located on a first portion of the active area, and a transistor located on a second portion adjacent to the first portion of the active area in the first direction. A width of a top surface area of the first portion in a second direction perpendicular to the first direction is smaller than that of a top surface area of the second portion in the second direction.
    Type: Grant
    Filed: December 13, 2012
    Date of Patent: January 7, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Aya Minemura, Kenji Sawamura, Mitsuhiro Noguchi
  • Publication number: 20130187208
    Abstract: According to one embodiment, a semiconductor device comprises an active area extending in a first direction, a contact plug located on a first portion of the active area, and a transistor located on a second portion adjacent to the first portion of the active area in the first direction. A width of a top surface area of the first portion in a second direction perpendicular to the first direction is smaller than that of a top surface area of the second portion in the second direction.
    Type: Application
    Filed: December 13, 2012
    Publication date: July 25, 2013
    Inventors: Aya Minemura, Kenji Sawamura, Mitsuhiro Noguchi
  • Patent number: 8426944
    Abstract: In some embodiments, an insulated gate bipolar transistor includes a drift layer, insulation gates formed at a principle surface portion of the drift layer, base regions formed in a between-gate region, an emitter region formed in the base region so as to be adjacent to the insulation gate, an emitter electrode connected to the emitter region, a collector layer formed at the other side of the principle surface portion of the drift layer, and a collector electrode connected to the collector layer. The conductive type base regions are separated with each other by the drift layers, and the drift layer and the emitter electrode are insulated by an interlayer insulation film.
    Type: Grant
    Filed: March 26, 2010
    Date of Patent: April 23, 2013
    Assignees: Semiconductor Components Industries, LLC, Sanyo Semiconductor Co., Ltd.
    Inventors: Shuji Yoneda, Kenji Sawamura
  • Patent number: 8395922
    Abstract: According to one embodiment, a semiconductor memory device includes a memory cell array, a first sense amplifier circuit, and a second sense amplifier circuit. The memory cell array includes a plurality of first memory cell units, a plurality of second memory cell units, a plurality of first interconnects, and a plurality of second interconnects. The first sense amplifier circuit is connected to the plurality of first interconnects. The second sense amplifier circuit is connected to the plurality of second interconnects. Heights of upper surfaces of interconnects are equal.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: March 12, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Mitsuhiro Noguchi, Kenji Sawamura, Takeshi Kamigaichi, Katsuaki Isobe
  • Publication number: 20130043523
    Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a plurality of gate electrode structures formed on a semiconductor substrate and an insulating film which covers the gate electrode structures and has an air gap in it. Each of the gate electrode structures includes a gate insulting film, a charge storage layer, an intermediary insulating film, and a control gate electrode. The control gate electrode includes a first control gate and a second control gate whose width is greater than that of the first control gate. The air gap is formed so as to be higher than a space between the control gate electrodes and than the control gate electrodes.
    Type: Application
    Filed: May 25, 2012
    Publication date: February 21, 2013
    Inventors: Takahiko Ohno, Kenji Sawamura, Yasuhiro Shiino
  • Patent number: 8357966
    Abstract: According to one embodiment, a semiconductor device comprises an active area extending in a first direction, a contact plug located on a first portion of the active area, and a transistor located on a second portion adjacent to the first portion of the active area in the first direction. A width of a top surface area of the first portion in a second direction perpendicular to the first direction is smaller than that of a top surface area of the second portion in the second direction.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: January 22, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Aya Minemura, Kenji Sawamura, Mitsuhiro Noguchi
  • Patent number: 8279679
    Abstract: A control circuit is configured to perform, in a write operation to a memory cell and a verify operation for verifying a threshold voltage of the memory cell, a voltage control to provide the memory cell with threshold voltage distributions. The circuit is configured to apply, in a read operation from the memory cell, to a selected memory cell a read voltage between the lower and upper limits of the threshold voltage distributions, and apply to an unselected memory cell a first read-pass voltage higher than the upper limit of a first threshold voltage distribution that is the maximum distribution of the threshold voltage distributions.
    Type: Grant
    Filed: December 28, 2010
    Date of Patent: October 2, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takeshi Kamigaichi, Kenji Sawamura
  • Publication number: 20120198297
    Abstract: A control circuit performs a write operation to 1-page memory cells along the selected word line, by applying a write pulse voltage to a selected word line, and then performs a verify read operation of confirming whether the data write is completed. When the data write is not completed, a step-up operation is performed of raising the write pulse voltage by a certain step-up voltage. A bit scan circuit determines whether the number of memory cells determined to reach a certain threshold voltage is equal to or more than a certain number among the memory cells read at the same time, according to read data held in the sense amplifier circuit as a result of the verify read operation. The control circuit changes the amount of the step-up voltage according to the determination of the bit scan circuit.
    Type: Application
    Filed: September 20, 2011
    Publication date: August 2, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Takeshi KAMIGAICHI, Kenji Sawamura
  • Patent number: 8194445
    Abstract: A semiconductor memory device includes a first insulation film, Charge accumulation portions, a second insulation film, and a control gate. The first insulation film is located on an active area (AA). The charge accumulation portions comprise minute crystals arranged on the first insulation film. A density of the charge accumulation portions at an end portion in an AA width direction of the first insulation film is higher than a density of the charge accumulation portions at a central potion in the AA width direction. The second insulation film is located on the first insulation film so as to coat the charge accumulation portions. The control gate is located on the second insulation film.
    Type: Grant
    Filed: March 19, 2010
    Date of Patent: June 5, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Kenji Sawamura
  • Publication number: 20110233622
    Abstract: According to one embodiment, a semiconductor device comprises an active area extending in a first direction, a contact plug located on a first portion of the active area, and a transistor located on a second portion adjacent to the first portion of the active area in the first direction. A width of a top surface area of the first portion in a second direction perpendicular to the first direction is smaller than that of a top surface area of the second portion in the second direction.
    Type: Application
    Filed: September 17, 2010
    Publication date: September 29, 2011
    Inventors: Aya Minemura, Kenji Sawamura, Mitsuhiro Noguchi