Patents by Inventor Kenji Susukida

Kenji Susukida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Positively photosensitive resin composition
    Patent number: 6475693
    Abstract: A positive-working radiation-sensitive resin composition showing a good throughput upon production of semiconductors or the like and less process dependence of dimensional accuracy as well as having high sensitivity and high resolution, and being able to form a pattern with good shape and a high aspect ratio.
    Type: Grant
    Filed: August 10, 2000
    Date of Patent: November 5, 2002
    Assignee: Clariant Finance (BVI) Limited
    Inventors: Kenji Susukida, Akio Arano, Masato Nishikawa
  • Positively photosensitive resin composition
    Patent number: 6391513
    Abstract: The positive-working radiation sensitive resin composition which has high sensitivity, high resolution and no residues in development and ability to form a pattern having a good profile. The positive-working radiation sensitive resin composition contains a mixed radiation sensitive novolak resin comprising the mixture of 1,2-naphthoquinonediazide-4-sulfonic acid ester of an alkali soluble novolak resin and 1,2-naphthoquinonediazide-5-sulfonic acid ester of an alkali soluble novolak resin, wherein the ratio by weight of the 1,2-naphthoquinonediazide-4-sulfonyl group and 1,2-naphthoquinonediazide-5-sulfonyl group ranges from 5:95 to 20:80.
    Type: Grant
    Filed: March 16, 2001
    Date of Patent: May 21, 2002
    Assignee: Clariant Finance (BVI) Limited
    Inventors: Kenji Susukida, Masato Nishikawa, Akio Arano