Abstract: There is provided a technique that includes: a first processing module including a first process container in which at least one substrate is processed, a first utility system including a first supply system which supplies a first processing gas into the first process container and a surface of the first utility system is connected or arranged close to the first processing module; and a first vacuum pump arranged at the same level as a first exhaust port of the first process container. The first vacuum pump exhausts an inside of the first process container and includes a first intake port formed laterally at a position substantially facing the first exhaust port of the first process container. A first exhaust pipe configured to substantially linearly bring the first exhaust port into fluid communication with the first intake port and including a first valve installed in a flow path.

Abstract: To provide an elevator group management device that can accurately present information about learning of operational efficiency of an elevator. The elevator group management device includes a traffic-flow estimating unit configured to estimate a traffic flow based on boarding and alighting floors of users and a number of boarding and alighting people of an elevator, a learning unit configured to determine a policy of running of a car based on the traffic flow estimated by the traffic-flow estimating unit, a simulation unit configured to evaluate operational efficiency at the time when the car is virtually run based on the policy determined by the learning unit, and a display control unit configured to cause an information display device to display information indicating a status of learning by the learning unit and the simulation unit.

Abstract: An elevator group management system includes: a hall call registration device which is provided at a first hall; a hall destination call registration device which is provided at a second hall; a notification device which is provided at the first hall; an assigned car display device which is provided at the second hall; and a group management control device which selects a priority car from among a plurality of cars. When a priority car is selected, the group management control device performs, with respect to a hall call to which the priority car is already assigned, hall call control which differs from control with respect to a hall destination call to which the priority car is already assigned.

Abstract: An elevator device that can continuously evacuate any evacuee left in a building by using an elevator. The elevator device includes a control device configured to maintain an evacuation operation mode corresponding to a rescue floor concerned when a car operation instructing device is operated on the rescue floor concerned before a predetermined time passes from when the car stops at the rescue floor concerned during the evacuation operation mode corresponding to the rescue floor concerned, and release the evacuation operation mode corresponding to the rescue floor concerned when the car operation instructing device is not operated on the rescue floor concerned before the predetermined time passes from when the car stops at the rescue floor concerned during the evacuation operation mode corresponding to the rescue floor concerned.

Abstract: An elevator group management system includes: a hall call registration device which is provided at a first hall; a hall destination call registration device which is provided at a second hall; a notification device which is provided at the first hall; an assigned car display device which is provided at the second hall; and a group management control device which selects a priority car from among a plurality of cars. When a priority car is selected, the group management control device performs, with respect to a hall call to which the priority car is already assigned, hall call control which differs from control with respect to a hall destination call to which the priority car is already assigned.

Abstract: An elevator device that can continuously evacuate any evacuee left in a building by using an elevator. The elevator device includes a control device configured to maintain an evacuation operation mode corresponding to a rescue floor concerned when a car operation instructing device is operated on the rescue floor concerned before a predetermined time passes from when the car stops at the rescue floor concerned during the evacuation operation mode corresponding to the rescue floor concerned, and release the evacuation operation mode corresponding to the rescue floor concerned when the car operation instructing device is not operated on the rescue floor concerned before the predetermined time passes from when the car stops at the rescue floor concerned during the evacuation operation mode corresponding to the rescue floor concerned.