Patents by Inventor Kenji Todoroki

Kenji Todoroki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing system and processing method
    Patent number: 6889108
    Abstract: The present invention is to provide a processing system and a processing method which do not require the selection of processing recipes by operators and can provide high throughputs. The processing system for processing an object group of one object-to-be-processed, or two or more objects-to-be-processed in a processing vessel with a processing liquid, comprises a plurality of processing vessel groups M1, M2, M3 each of at least one or more processing vessels, which can perform the same processing; transportation apparatus 22 for transporting object groups WS to the plurality of processing vessel groups; and a control unit 45 for selecting the processing vessel groups M1, M2, M3 for the object groups WS to be transported to, the control unit 45 having an applying function of applying processing recipes for the respective object groups and a selecting function of selecting the processing vessel groups for executing the respective applied processing recipes in a prescribed sequence.
    Type: Grant
    Filed: January 7, 2003
    Date of Patent: May 3, 2005
    Assignee: Tokyo Electron Limited
    Inventors: Osamu Tanaka, Kenji Todoroki
  • Processing system and processing method
    Publication number: 20030130754
    Abstract: The present invention is to provide a processing system and a processing method which do not require the selection of processing recipes by operators and can provide high throughputs.
    Type: Application
    Filed: January 7, 2003
    Publication date: July 10, 2003
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Osamu Tanaka, Kenji Todoroki