Abstract: In a laminating direction of first to fifth ceramic sheets, a first slit and a second slit are positioned closer to a first mounting section and a second mounting section than a first communication hole, a second communication hole, a third communication hole and a fourth communication hole. Moreover, an overlapping section where each first slit and the first communication hole overlap, and an overlapping section where each second slit and the third communication hole overlap, are positioned in the vicinity of an area where the first mounting section and the second mounting section are disposed when viewed from the laminating direction of the first to fifth ceramic sheets.

Abstract: Channel members 100 to 107 according to the present invention have an inner spiral channel 9 through which a fluid 23 flows. The channel 9 is formed by a lid part 1, a bottom plate part 3, and a wall part 2 connected to the lid part 1 and the bottom plate part 3. The wall part 2 is made of a ceramic laminate. Even if the wall part 2 of the channel members 100 to 107 is narrow between channel segments 9, its good corrosion resistance allows the channel 9 to be resistant to collapse when the fluid 23 is supplied at high pressure. A heat exchanger 200, a semiconductor unit 300, and a semiconductor manufacturing apparatus 400 including any of the channel members 100 to 107 have improved heat exchange efficiency between the channel members 100 to 107 and the fluid 23.

Abstract: Disclosed is a heat dissipation device which is reduced in the number of components, while having sufficient insulating function and cooling function with respect to an object to be cooled. The heat dissipation device includes a base that is formed from a ceramic and a refrigerant channel for circulating a refrigerant within the base. The base is formed by sintering a stacked body in which a plurality of ceramic sheets are stacked. The plurality of ceramic sheets include the ceramic sheet which is provided with a plurality of slits that constitute the refrigerant channel, and the ceramic sheets which are provided with communication paths that communicate the refrigerant channel and outside units with each other. A semiconductor device is configured by bonding a metal plate, on which a semiconductor element is mounted, to the heat dissipation device.

Abstract: In a laminating direction of first to fifth ceramic sheets, a first slit and a second slit are positioned closer to a first mounting section and a second mounting section than a first communication hole, a second communication hole, a third communication hole and a fourth communication hole. Moreover, an overlapping section where each first slit and the first communication hole overlap, and an overlapping section where each second slit and the third communication hole overlap, are positioned in the vicinity of an area where the first mounting section and the second mounting section are disposed when viewed from the laminating direction of the first to fifth ceramic sheets.

Abstract: Channel members 100 to 107 according to the present invention have an inner spiral channel 9 through which a fluid 23 flows. The channel 9 is formed by a lid part 1, a bottom plate part 3, and a wall part 2 connected to the lid part 1 and the bottom plate part 3. The wall part 2 is made of a ceramic laminate. Even if the wall part 2 of the channel members 100 to 107 is narrow between channel segments 9, its good corrosion resistance allows the channel 9 to be resistant to collapse when the fluid 23 is supplied at high pressure. A heat exchanger 200, a semiconductor unit 300, and a semiconductor manufacturing apparatus 400 including any of the channel members 100 to 107 have improved heat exchange efficiency between the channel members 100 to 107 and the fluid 23.

Abstract: There is provided a flow channel member which is configured by laminating a plurality of side wall units and inside which a flow channel is provided, wherein occurrence of joint failure of the side wall units are reduced. A flow channel member includes a cover unit, a side wall unit, and a bottom plate unit, wherein a flow channel through which a fluid flows is provided inside the flow channel member, and a gap which communicates with the flow channel is provided between the cover unit and the side wall unit. According to the flow channel member, since the gap which communicates with the flow channel is located between the cover unit and the side wall unit, a contact area between the flow channel and the fluid increases, and thus heat exchange efficiency with the cover unit may be increased.

Abstract: Disclosed is a heat dissipation device which is reduced in the number of components, while having sufficient insulating function and cooling function with respect to an object to be cooled. The heat dissipation device includes a base that is formed from a ceramic and a refrigerant channel for circulating a refrigerant within the base. The base is formed by sintering a stacked body in which a plurality of ceramic sheets are stacked. The plurality of ceramic sheets include the ceramic sheet which is provided with a plurality of slits that constitute the refrigerant channel, and the ceramic sheets which are provided with communication paths that communicate the refrigerant channel and outside units with each other. A semiconductor device is configured by bonding a metal plate, on which a semiconductor element is mounted, to the heat dissipation device.