Abstract: An X-ray analysis apparatus for detecting, using an X-ray detector, X-rays given off by a sample when the sample is irradiated with X-rays, the X-ray analysis apparatus having replaceable components. The X-ray analysis apparatus comprises labels attached to the replaceable components and including symbols indicating the types of replaceable components, a camera for photographing the replaceable components and the labels, and CPU and image recognition software for specifying the types of replaceable components by calculation based on the symbols in the labels.

Abstract: An X-ray optical component device having an X-ray optical component unit, a motor controller, and a connector. The connector has motor pins and motor terminals electrically connected to a motor when engaged with each other, and a signal pin and signal terminal for sensing detachment of the connector, the signal pin and signal terminal being capable of engaging with each other. A pin-side connector and a terminal-side connector are detachable. When the pin-side connector is detached from the terminal-side connector, the time that the signal pin is removed from the signal terminal is earlier than the time that the motor pins are removed from the motor terminals. During replacement of an X-ray optical component unit equipped with a motor for adjusting the position of an X-ray optical component, unwanted movement of the position of the X-ray optical component provided in the unit is prevented.

Abstract: An X-ray optical component device having an X-ray optical component unit, a motor controller, and a connector. The connector has motor pins and motor terminals electrically connected to a motor when engaged with each other, and a signal pin and signal terminal for sensing detachment of the connector, the signal pin and signal terminal being capable of engaging with each other. A pin-side connector and a terminal-side connector are detachable. When the pin-side connector is detached from the terminal-side connector, the time that the signal pin is removed from the signal terminal is earlier than the time that the motor pins are removed from the motor terminals. During replacement of an X-ray optical component unit equipped with a motor for adjusting the position of an X-ray optical component, unwanted movement of the position of the X-ray optical component provided in the unit is prevented.

Abstract: A motion control system comprising a servo motor for moving a rotary stage; a scale provided on the rotary stage or on an object that moves integrally with the rotary stage; a plurality of reading heads for detecting the scale and outputting a signal; a data processing part for calculating an average value of rotation angle data based on each of the output signals from the reading heads and outputting the average value as a signal; and a servo amplifier for controlling the motor based on the signal representing the average value of the rotation angle. The motion control system can cause the rotary stage to rotate to a desired rotation angle to a high degree of accuracy using the reading heads.

Abstract: An X-ray analysis apparatus for detecting, using an X-ray detector, X-rays given off by a sample when the sample is irradiated with X-rays, the X-ray analysis apparatus having replaceable components. The X-ray analysis apparatus comprises labels attached to the replaceable components and including symbols indicating the types of replaceable components, a camera for photographing the replaceable components and the labels, and CPU and image recognition software for specifying the types of replaceable components by calculation based on the symbols in the labels.

Abstract: A motion control system comprising a servo motor for moving a rotary stage; a scale provided on the rotary stage or on an object that moves integrally with the rotary stage; a plurality of reading heads for detecting the scale and outputting a signal; a data processing part for calculating an average value of rotation angle data based on each of the output signals from the reading heads and outputting the average value as a signal; and a servo amplifier for controlling the motor based on the signal representing the average value of the rotation angle. The motion control system can cause the rotary stage to rotate to a desired rotation angle to a high degree of accuracy using the reading heads.