Kenji Watanabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
Abstract: Provided is a method of adjusting an electron-beam irradiated area in an electron beam irradiation apparatus that deflects an electron beam with a deflector to irradiate an object with the electron beam, the method including: emitting an electron beam while changing an irradiation position on an adjustment plate by controlling the deflector in accordance with an electron beam irradiation recipe, the adjustment plate detecting a current corresponding to the emitted electron beam; acquiring a current value detected from the adjustment plate; forming image data corresponding to the acquired current value; determining whether the electron-beam irradiated area is appropriate based on the formed image data; and updating the electron beam irradiation recipe when the electron-beam irradiated area is determined not to be appropriate.
Abstract: A method is disclosed for monitoring and controlling a process of plasma-assisted surface modification of a layer formed on a substrate. The method includes flowing a surface modification gas into a plasma processing chamber of a plasma processing system, igniting a plasma in the plasma processing chamber to initiate a surface modification process for a layer formed on a substrate, and acquiring optical emission spectra from an optical emission spectroscopy system attached to the plasma processing chamber, during the surface modification process for the layer. For one embodiment, the method includes altering at least one parameter of the surface modification process based on the acquired optical emission spectra. For one embodiment, the acquired optical emission spectra can include an intensity of a spectral line, a slope of a spectral line, or both to enable endpoint control of the surface modification process. Additional methods and related systems are also disclosed.
March 13, 2018
Date of Patent:
October 15, 2019
Tokyo Electron Limited
Brian J. Coppa, Viswas Purohit, Seiichi Watanabe, Kenji Komatsu
Abstract: Provided are a processing device and a processing method with which the device can be made more compact, and with which highly precise processing can be performed. The processing device, which processes a member to be processed by irradiating the member to be processed with a laser, has: a laser oscillator having a plurality of vertical cavity surface-emitting laser diode chips that output laser light having a wavelength of 1,070 nm or less, and a substrate on the surface of which the plurality of vertical cavity surface-emitting laser diode chips are arranged in a matrix; a guidance optical system that guides the laser light output from the laser oscillator; and a control device that controls the output of the laser oscillator.
Abstract: A plurality of images of a sample are simultaneously captured at different focal lengths by a plurality of cameras. An analysis apparatus includes: a branch section configured to cause light passing through the sample containing a material component to branch off into a plurality of optical paths; a plurality of imaging devices for simultaneously capturing images of the sample in a flow path at different focal points by using the light caused to branch off into the plurality of optical paths; and a controller configured to process the captured images.
Abstract: An acquisition portion of a pretreatment control apparatus acquires identification information capable of identifying a treatment medium (step S1). A first transmission portion transmits a pretreatment instruction based on the identification information to a pretreatment device which performs a pretreatment with respect to the treatment medium (step S13). A second transmission portion transmits a transmission instruction for identified print data based on the identification information, to a storage device which stores print data (step S3). As a result, the pretreatment control apparatus can transmit the pretreatment instruction and the identified print data by acquiring a single piece of identification information. Therefore, the number of processing steps by the pretreatment control apparatus is fewer than when the pretreatment instruction and the identified print data are transmitted by acquiring different information.
September 25, 2018
October 3, 2019
Shuichi TAMAKI, Takeshi WATANABE, Kenji SATO
Abstract: Provided is a threaded-hole inspection device having high inspection precision. An incomplete thread ridge portion of a gauge portion 5 of a thread gauge 1 is removed, a phase-positioning portion 8 for positioning a tip-side start point 7 of a complete thread ridge at a prescribed phase when the thread gauge 1 is mounted on a rotating-shaft portion 2 is provided to a fastening portion 6 of the thread gauge 1 that is to be fastened to the rotating-shaft portion 2, and a phase-positioning engaging portion 9 that is to engage with the phase-positioning portion 8 is provided to the rotating-shaft portion 2.
Abstract: A vehicular display device includes a display configured to display an image in a display area that overlaps a position of a windshield of a vehicle, a display processor configured to display a direction guide image in the display area in a manner superimposed on a road on which the vehicle is traveling, the direction guide image being an image showing a turn position where the vehicle is to make a turn on the road, and a display pattern determiner configured to determine a display pattern of the direction guide image based on a traveling speed of the vehicle. The display pattern determiner determines the display pattern such that, the higher the traveling speed is, the longer a length from a top end to a bottom end of the direction guide image is.
Abstract: Cutting machining is performed on a workpiece by making a cutting tool travel relative to the workpiece while rotating the cutting tool such that a peripheral speed of the cutting tool becomes equal to or more than a cutting speed of the cutting tool, while an outer peripheral surface and an end surface of the cutting tool function as a rake surface and a relief surface, respectively.
Abstract: There is provided a piezoelectric laminate, including: a substrate; and a piezoelectric film formed on the substrate, wherein the piezoelectric film contains an alkali niobium oxide represented by a composition formula of (K1?xNax)NbO3 (0<x<1), having a perovskite structure, and contains a metallic element selected from a group consisting of Cu and Mn at a concentration of more than 0.6 at % and 2.0 at % or less.
Abstract: A method of producing a toner including the steps of: mixing resin fine particles, an organic solvent, and a resin R with a dispersion medium containing carbon dioxide, to prepare a dispersion of resin R-containing droplets; and removing the organic solvent by flowing carbon dioxide, wherein the resin fine particles contain one or more resins that have a partial structure A, B, and C, and are soluble in chloroform; the SP value of the partial structure A, the resin R, and the partial structure B satisfy particular relationships; a resin A constituted of the partial structure A and a resin B constituted of the partial structure B are soluble in the organic solvent; and a resin C constituted of the partial structure C is insoluble in the organic solvent.
Abstract: A coated ?-sulfofatty acid alkyl ester salt particle group containing ?-sulfofatty acid alkyl ester salt particles (A) and a zeolite particle group-containing coating component (B) with which the particles (A) are coated, in which the zeolite particle group is a zeolite particle group (b1) having a mean particle size of equal to or greater than 0.8 ?m and less than 3.8 ?m.
Abstract: A storage cell control system configured to perform charge/discharge control for a plurality of storage cells under control based on a power adjustment request from a power system includes: a power storage capacity calculating means configured to calculate a current power storage capacity of the storage cell based on storage cell information of the storage cell; a target power storage capacity setting means configured to set a target power storage capacity in stopping an operation of the storage cell; a capacity degradation speed calculating means configured to calculate a current capacity degradation speed and a target capacity degradation speed with respect to each power storage capacity by applying the current power storage capacity and the target power storage capacity to capacity degradation speed correlation information set in advance; and a power distributing means configured to distribute power to the plurality of storage cells in such a manner that when it is assumed that t is an elapsed time from st
Abstract: An array speaker device (1A) includes a vibrator (20) arranged on one face of a substrate having a uniform thickness, the vibrator being formed of a base material layer (11), a first electrode layer (12), a piezoelectric element layer (13), and a second electrode layer (14), each of which has a uniform thickness, and which are layered in the order mentioned on the substrate. A hole through which a sound wave is outputted in the thickness direction of the substrate is provided on the substrate at a position corresponding to the vibrator (20), the sound wave being generated by vibration of the vibrator (20) to which a voltage signal is applied via the first electrode layer (12) and the second electrode layer (14). Scallops (S) made of an indentation and a projection alternating in the thickness direction of the substrate are formed on the inner circumferential wall of the hole.
Abstract: An earphone (1) is provided that includes a first vibration plate (31) for vibration by a first piezoelectric element (32) and a cylindrically-shaped casing (2) for transmission of the vibration of the first vibration plate (31) to ear canal cartilage. The first vibration plate (31) is disposed inside the casing (2). The earphone (1) has a structure whereby an amount of sound leakage, which is due to transmission of the vibration of the first vibration plate (31) to the air, is low. The ear canal cartilage transmits sound to the eardrum of only one ear, thereby enabling localization of sound. The woofer (3) maintains sound pressure at low frequencies.
Abstract: The cutting device includes a rotating portion for rotating the cutting tool in a rotation axis line of the cutting tool and a traveling means for making the cutting tool travel relative to a workpiece. The rotating means and the traveling means rotates the outer peripheral surface of the cutting tool and makes the cutting tool travel, having the outer peripheral surface function as the rake surface, so as to perform cutting machining.
Abstract: A low-resistivity carbon nanotube aggregate includes a plurality of carbon nanotubes each having one or more walls, wherein a ratio of a total number of carbon nanotubes that have two or three walls relative to a total number of said plurality of carbon nanotubes is 75% or greater, and wherein, in a G band of a Raman spectrum in the Raman spectroscopy of the plurality of carbon nanotubes, a G+/Gtotal ratio that is indicative of an amount of semiconductor carbon nanotubes relative to metallic carbon nanotubes is 0.70 or greater.
Abstract: A method produces a chemical product by continuous fermentation including filtering a culture liquid of a microorganism(s) through a separation membrane, retaining unfiltered liquid in, or refluxing unfiltered liquid to, the culture liquid, adding a fermentation feedstock to the culture liquid, and recovering a product in the filtrate, wherein the microorganism(s) is/are a microorganism(s) that undergo(es) catabolite repression, and the fermentation feedstock comprises hexose and pentose.
Abstract: A transformer is configured to include a pair of cores that each have an inner leg, wherein a primary winding that is wound around a bobbin having a hollow into which the inner legs of the cores are inserted and that is hermetically sealed with resin material, and a secondary winding that has a hollow into which the inner legs of the cores are inserted and that is constituted of a conductor formed by die-cutting a metal plate into a ring are dispersedly arranged over the inner legs of the cores.
Abstract: The present invention provides a detachable-head-type camera which, when a camera head unit is exchanged, can perform correction processing with a unique value corresponding to a camera head unit after the exchange, and provides a work machine including the detachable-head-type camera. Camera head unit of detachable-head-type camera is detachably connected to image data generation section via dedicated cable. In non-volatile memory of camera head unit, unique value corresponding to the characteristics unique to at least one of imaging element or lens is stored. Unique value is used for correction processing of image data performed by at least one of image data generation section or image processing unit.
Abstract: A node in a DTN includes: a memory; and a processor coupled to the memory and configured to execute data transfer processing for the DTN, wherein the data transfer processing including: receiving a plurality of bundles to be transferred to a same destination node on the DTN, each of the plurality of bundles including any one of a plurality of data segments acquired by dividing data of a content; deleting a part of the bundles from among the plurality of bundles without transferring to any other node or compressing a data size of a payload of the part of the bundles in accordance with a communication status of the DTN; and transmitting either a rest of the bundles excluding the deleted part of the bundles or the plurality of bundles including the part of the bundles having the compressed payloads to the DTN for transmitting to the destination node.