Patents by Inventor Kenji Yamawaki

Kenji Yamawaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dielectrically isolated structure for use in soi-type semiconductor device
    Patent number: 5126817
    Abstract: A dielectrically isolated structure for use in an SOI-type semiconductor device according to the present invention comprises a substrate having an element-forming region formed therein on a first insulating film, the region being made of a first material, at least one trench formed in the element-forming region and extending to the first insulating film, second insulating films formed on side walls of the trench, and a film made of a second material, and embedded in only an upper portion of the trench such that a bottom portion of the trench is hollow.
    Type: Grant
    Filed: October 12, 1990
    Date of Patent: June 30, 1992
    Assignees: Kabushiki Kaisha Toshiba, Tokuda Seisakusho Co., Ltd.
    Inventors: Yoshiro Baba, Yutaka Koshino, Akihiko Osawa, Kenji Yamawaki