Abstract: A member for a semiconductor manufacturing apparatus, includes: a ceramic plate that has a ceramic plate through hole; an electroconductive base plate that has a base plate through hole and that is disposed on a lower surface side of the ceramic plate; an insulating sleeve which is inserted into the base plate through hole and of which an outer peripheral surface is adhered to an inner peripheral surface of the base plate through hole via an adhesion layer; and a sleeve through hole that passes through the insulating sleeve in the up-down direction and that communicates with the ceramic plate through hole. The insulating sleeve has a tool engaging portion that is engageable with an external tool, and upon being engaged with the external tool, the tool engaging portion transmits rotation torque of the external tool to the insulating sleeve.

Abstract: A member for semiconductor manufacturing apparatus, includes: a ceramic plate having a wafer placement surface; a plug receiving hole formed in a surface of the ceramic plate opposite to the wafer placement surface; a gas outlet port extending through a bottom wall of the plug receiving hole; a plug received in the plug receiving hole; and a gas flow path disposed inside the plug to be continuous with the gas outlet port, wherein a stepped portion is disposed on a side surface of the plug or an inner surface of the plug receiving hole, the plug receiving hole and the plug are in contact with each other in an area deeper than the stepped portion, a gap is formed between the plug receiving hole and the plug in an area shallower than the stepped portion, and a plug support member made of an adhesive material is formed in the gap.

Abstract: This invention relates to an automobile suspension of a vehicle, which can suspend two wheels located on the sides of the vehicle. The automobile suspension includes a pair of torsion bars extending in the longitudinal direction of the vehicle, a pair of brackets projecting inwardly from a pair of body side members of the vehicle and a pair of rear arms mounted on the pair of brackets. Each rear arm is mounted on an end of each torsion bar. Each bracket includes at least two vertical walls having an interval defined therebetween and each vertical wall has an upper recess thereon. The upper recess of each vertical wall is aligned with the uper recess of another vertical wall. A protrusion is projected upwardly from the bracket and the protrusion is located between the two vertical walls. Each rear arm includes at least two vertical plates and a cylinder. The two vertical plates define a space therebetween, and the cylinder penetrates the two vertical plates.