Patents by Inventor Kenkichi Okubo

Kenkichi Okubo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for pre-baking substrate upstream of process chamber
    Patent number: 9349620
    Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.
    Type: Grant
    Filed: July 9, 2014
    Date of Patent: May 24, 2016
    Assignee: ASM IP Holdings B.V.
    Inventors: Keisuke Kamata, Hiroyuki Sato, Kazunori Furukawahara, Masaei Suwada, Kenkichi Okubo, Izumi Arai
  • Apparatus and Method for Pre-Baking Substrate Upstream of Process Chamber
    Publication number: 20160013084
    Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.
    Type: Application
    Filed: July 9, 2014
    Publication date: January 14, 2016
    Inventors: Keisuke Kamata, Hiroyuki Sato, Kazunori Furukawahara, Masaei Suwada, Kenkichi Okubo, Izumi Arai