Patents by Inventor Kenneth A. Abbott

Kenneth A. Abbott has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vapor deposition of anti-stiction layer for micromechanical devices
    Patent number: 9150959
    Abstract: A vapor deposition system includes a filter-diffuser device connected to a vapor inlet within a vacuum chamber for simultaneously filtering inflowing vapor to remove particulate matter while injecting vapor containing perfluordecanoic acid (PFDA) into the chamber through radially arranged porous metal filters to enable the deposition of a uniform monolayer of PFDA molecules onto the surfaces of a micromechanical device, such as a digital micromirror device.
    Type: Grant
    Filed: April 19, 2011
    Date of Patent: October 6, 2015
    Inventor: Kenneth A. Abbott
  • Vapor Deposition of Anti-Stiction Layer for Micromechanical Devices
    Publication number: 20120040095
    Abstract: A vapor deposition system includes a filter-diffuser device connected to a vapor inlet within a vacuum chamber for simultaneously filtering inflowing vapor to remove particulate matter while injecting vapor containing perfluordecanoic acid (PFDA) into the chamber through radially arranged porous metal filters to enable the deposition of a uniform monolayer of PFDA molecules onto the surfaces of a micromechanical device, such as a digital micromirror device.
    Type: Application
    Filed: April 19, 2011
    Publication date: February 16, 2012
    Inventor: Kenneth A. Abbott
  • Vapor deposition of anti-stiction layer for micromechanical devices
    Patent number: 7927423
    Abstract: A vapor deposition system includes a filter-diffuser device connected to a vapor inlet within a vacuum chamber for simultaneously filtering inflowing vapor to remove particulate matter while injecting vapor containing perfluordecanoic acid (PFDA) into the chamber through radially arranged porous metal filters to enable the deposition of a uniform monolayer of PFDA molecules onto the surfaces of a micromechanical device, such as a digital micromirror device.
    Type: Grant
    Filed: May 25, 2005
    Date of Patent: April 19, 2011
    Inventor: Kenneth A. Abbott