Patents by Inventor Kenneth Brian Doering
Kenneth Brian Doering has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12257592Abstract: A showerhead with an embedded nut is disclosed. The showerhead comprises an embedded nut within a cavity. The nut may be engaged by a bolt through an opening in the cavity to support the showerhead. The apparatus allows for the support of the showerhead without the potential for metal contamination.Type: GrantFiled: May 12, 2023Date of Patent: March 25, 2025Assignee: APPLIED MATERIALS, INC.Inventor: Kenneth Brian Doering
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Publication number: 20250037978Abstract: Gas distribution assemblies for semiconductor devices are described. The gas distribution assemblies include a backplate, a faceplate, a counterbored hole, and at least one orifice. The at least one orifice includes, for example, at least one straight orifice, or at least two angled orifices. Some embodiments of the gas distribution assemblies provide for reduced plasma damage in a processing chamber. Some embodiments of the gas distribution assemblies provide for reduced jetting on a substrate in a processing chamber. Methods of reducing plasma damage in gas distribution assemblies are also described.Type: ApplicationFiled: July 24, 2023Publication date: January 30, 2025Applicant: Applied Materials, Inc.Inventors: Sanjeev Baluja, Chaowei Wang, Kevin Griffin, Kenneth Brian Doering, Hanhong Chen, Joseph AuBuchon
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Publication number: 20250014922Abstract: Metrology slot plates, processing chamber lids and processing chambers having metrology slot plates are described. Each of the metrology slot plates independently comprises one or more of a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser) or an emissometer.Type: ApplicationFiled: July 8, 2024Publication date: January 9, 2025Applicant: Applied Materials Inc.Inventors: Kenneth Brian Doering, Vivek B. Shah, Ashutosh Agarwal, Sanjeev Baluja, Shrihari Sampathkumar, Chunlei Zhang
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Publication number: 20240395506Abstract: A microwave plasma impedance transformers comprising a thermal break and methods of use are described. The impedance transformer comprises a housing having a first end and a second end defining a length of the housing. The housing has a channel with channel walls extending through the length from the first end to the second end, and the channel has an opening in the first end of the housing with a first end diameter and an opening in the second end of the housing with a second end diameter. The first end diameter being greater than the second end diameter. The channel acts as a conical impedance transformer.Type: ApplicationFiled: November 9, 2023Publication date: November 28, 2024Applicant: Applied Materials, Inc.Inventors: Kenneth Brian Doering, Xiaokang Yang, Sathya Swaroop Ganta
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Patent number: 12057333Abstract: Metrology slot plates, processing chamber lids and processing chambers having metrology slot plates are described. Each of the metrology slot plates independently comprises one or more of a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser) or an emissometer.Type: GrantFiled: September 3, 2021Date of Patent: August 6, 2024Assignee: Applied Materials, Inc.Inventors: Kenneth Brian Doering, Vivek B. Shah, Ashutosh Agarwal, Sanjeev Baluja, Shrihari Sampathkumar, Chunlei Zhang
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Publication number: 20230317416Abstract: Plasma showerheads with improved gas uniformity are disclosed. One or more embodiment of the disclosure provides a plasma showerhead with angled gas nozzles. Some embodiments of the disclosure have gas nozzles angled by a vertical offset angle and/or a directional offset angle. None of the gas channels and/or the gas nozzles intersect with the plasma regions of the showerhead.Type: ApplicationFiled: April 1, 2022Publication date: October 5, 2023Applicant: Applied Materials, Inc.Inventors: Chaowei Wang, Kenneth Brian Doering, Hanhong Chen, Kartik Shah, Kevin Griffin, Hao Zhang
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Publication number: 20230278062Abstract: A showerhead with an embedded nut is disclosed. The showerhead comprises an embedded nut within a cavity. The nut may be engaged by a bolt through an opening in the cavity to support the showerhead. The apparatus allows for the support of the showerhead without the potential for metal contamination.Type: ApplicationFiled: May 12, 2023Publication date: September 7, 2023Applicant: Applied Materials, Inc.Inventor: Kenneth Brian Doering
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Patent number: 11684941Abstract: A showerhead with an embedded nut is disclosed. The showerhead comprises an embedded nut within a cavity. The nut may be engaged by a bolt through an opening in the cavity to support the showerhead. The apparatus allows for the support of the showerhead without the potential for metal contamination.Type: GrantFiled: November 16, 2020Date of Patent: June 27, 2023Assignee: APPLIED MATERIALS, INC.Inventor: Kenneth Brian Doering
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Publication number: 20230076170Abstract: Metrology slot plates, processing chamber lids and processing chambers having metrology slot plates are described. Each of the metrology slot plates independently comprises one or more of a plate blank, a reflectometer, a capacitance sensor, a gas flow meter, a manometer, a pyrometer, a distance sensor (laser) or an emissometer.Type: ApplicationFiled: September 3, 2021Publication date: March 9, 2023Applicant: Applied Materials, Inc.Inventors: Kenneth Brian Doering, Vivek B. Shah, Ashutosh Agarwal, Sanjeev Baluja, Shrihari Sampathkumar, Chunlei Zhang
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Patent number: 11584993Abstract: Gas distribution assemblies and methods for providing a flow of gases to a process station are described. The gas distribution assemblies comprise a pumping liner with a showerhead and a gas funnel positioned therein. The pumping liner has an inner wall that slants at a first angle relative to a central axis of the gas distribution assembly so that the inner wall adjacent the bottom wall of the pumping liner is closer to the central axis than the inner wall adjacent the top wall. The gas funnel and pumping liner form a plenum between the outer wall of the gas funnel, a cavity in the bottom wall of the gas funnel and the inner wall of the pumping liner.Type: GrantFiled: October 19, 2020Date of Patent: February 21, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Kenneth Brian Doering, Dhritiman Subha Kashyap, Kartik Shah
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Patent number: 11584992Abstract: Gas injector inserts having a wedge-shaped housing, at least one first slot and at least one second slot are described. The housing has a first opening in the back face that is in fluid communication with the first slot in the front face and a second opening in the back face that is in fluid communication with the second slot in the front face. Each of the first slot and the second slot has an elongate axis that extends from the inner peripheral end to the outer peripheral end of the housing. The gas injector insert is configured to provide a flow of gas through the first slots at supersonic velocity. Gas distribution assemblies and processing chambers including the gas injector inserts are described.Type: GrantFiled: October 27, 2021Date of Patent: February 21, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Kenneth Brian Doering, Mario D. Silvetti, Kevin Griffin
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Patent number: 11577946Abstract: Apparatus and methods for lifting loads are described. The load lift includes a support frame and a lift assembly with main cylinder and at least one standby cylinder connecting a rotatable cross beam with a clamp plate. A rotary actuator assembly is connected to the lift beam to move the lift assembly out of the way while not in use by rotating the lift assembly from a lift position to a standby position.Type: GrantFiled: August 8, 2020Date of Patent: February 14, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Abhishek Chowdhury, Kevin Griffin, Kenneth Brian Doering, Santhoshkumar Doddegowdanapalya Nanjundegowda, Somashekhar Kosthi, Abhijit Ghosh
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Publication number: 20220119948Abstract: Gas distribution assemblies and methods for providing a flow of gases to a process station are described. The gas distribution assemblies comprise a pumping liner with a showerhead and a gas funnel positioned therein. The pumping liner has an inner wall that slants at a first angle relative to a central axis of the gas distribution assembly so that the inner wall adjacent the bottom wall of the pumping liner is closer to the central axis than the inner wall adjacent the top wall. The gas funnel and pumping liner form a plenum between the outer wall of the gas funnel, a cavity in the bottom wall of the gas funnel and the inner wall of the pumping liner.Type: ApplicationFiled: October 19, 2020Publication date: April 21, 2022Applicant: Applied Materials, Inc.Inventors: Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Kenneth Brian Doering, Dhritiman Subha Kashyap, Kartik Shah
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Publication number: 20220049354Abstract: Gas injector inserts having a wedge-shaped housing, at least one first slot and at least one second slot are described. The housing has a first opening in the back face that is in fluid communication with the first slot in the front face and a second opening in the back face that is in fluid communication with the second slot in the front face. Each of the first slot and the second slot has an elongate axis that extends from the inner peripheral end to the outer peripheral end of the housing. The gas injector insert is configured to provide a flow of gas through the first slots at supersonic velocity. Gas distribution assemblies and processing chambers including the gas injector inserts are described.Type: ApplicationFiled: October 27, 2021Publication date: February 17, 2022Applicant: Applied Materials, Inc.Inventors: Kenneth Brian Doering, Mario D. Silvetti, Kevin Griffin
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Publication number: 20220041413Abstract: Apparatus and methods for lifting loads are described. The load lift includes a support frame and a lift assembly with main cylinder and at least one standby cylinder connecting a rotatable cross beam with a clamp plate. A rotary actuator assembly is connected to the lift beam to move the lift assembly out of the way while not in use by rotating the lift assembly from a lift position to a standby position.Type: ApplicationFiled: August 8, 2020Publication date: February 10, 2022Applicant: Applied Materials, Inc.Inventors: Abhishek Chowdhury, Kevin Griffin, Kenneth Brian Doering, Santhoshkumar Doddegowdanapalya Nanjundegowda, Somashekhar Kosthi, Abhijit Ghosh
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Patent number: 11174553Abstract: Gas injector inserts having a wedge-shaped housing, at least one first slot and at least one second slot are described. The housing has a first opening in the back face that is in fluid communication with the first slot in the front face and a second opening in the back face that is in fluid communication with the second slot in the front face. Each of the first slot and the second slot has an elongate axis that extends from the inner peripheral end to the outer peripheral end of the housing. The gas injector insert is configured to provide a flow of gas through the first slots at supersonic velocity. Gas distribution assemblies and processing chambers including the gas injector inserts are described.Type: GrantFiled: June 18, 2019Date of Patent: November 16, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Kenneth Brian Doering, Mario D. Silvetti, Kevin Griffin
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Publication number: 20210146394Abstract: A showerhead with an embedded nut is disclosed. The showerhead comprises an embedded nut within a cavity. The nut may be engaged by a bolt through an opening in the cavity to support the showerhead. The apparatus allows for the support of the showerhead without the potential for metal contamination.Type: ApplicationFiled: November 16, 2020Publication date: May 20, 2021Applicant: Applied Materials, Inc.Inventor: Kenneth Brian Doering
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Publication number: 20210092800Abstract: Heaters having a body with having a top and bottom comprising pyrolytic boron nitride (PBN), a first heater electrode and a second heater electrode are described. The heater electrodes can be enclosed within an electrically insulating standoff and connected to separate busbars to provide power. Heater assemblies including one or more of the heaters and processing chambers including the heater assemblies are also described.Type: ApplicationFiled: February 20, 2019Publication date: March 25, 2021Applicant: Applied Materials, Inc.Inventors: Kenneth Brian Doering, Gregory J. Wilson, Karthik Ramanathan, Mario D. Silvetti, Kevin Griffin
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Publication number: 20190382896Abstract: Gas injector inserts having a wedge-shaped housing, at least one first slot and at least one second slot are described. The housing has a first opening in the back face that is in fluid communication with the first slot in the front face and a second opening in the back face that is in fluid communication with the second slot in the front face. Each of the first slot and the second slot has an elongate axis that extends from the inner peripheral end to the outer peripheral end of the housing. The gas injector insert is configured to provide a flow of gas through the first slots at supersonic velocity. Gas distribution assemblies and processing chambers including the gas injector inserts are described.Type: ApplicationFiled: June 18, 2019Publication date: December 19, 2019Inventors: Kenneth Brian Doering, Mario D. Silvetti, Kevin Griffin