Abstract: A lithographic apparatus is provided. The lithographic apparatus includes a reticle and an electrostatic clamp configured to releasably hold the reticle. The electrostatic clamp includes a first substrate having opposing first and second surfaces, a plurality of burls located on the first surface and configured to contact the reticle, a second substrate having opposing first and second surfaces. The first surface of the second substrate is coupled to the second surface of the first substrate. A plurality of cooling elements are located between the first surface of the second substrate and the second surface of the first substrate. The cooling elements are configured to cause electrons to travel from the second surface of the first substrate to the first surface of the second substrate. Each cooling element is substantially aligned with a respective burl.

Abstract: A lithographic apparatus is provided. The lithographic apparatus includes a reticle and an electrostatic clamp configured to releasably hold the reticle. The electrostatic clamp includes a first substrate having opposing first and second surfaces, a plurality of burls located on the first surface and configured to contact the reticle, a second substrate having opposing first and second surfaces. The first surface of the second substrate is coupled to the second surface of the first substrate. A plurality of cooling elements are located between the first surface of the second substrate and the second surface of the first substrate. The cooling elements are configured to cause electrons to travel from the second surface of the first substrate to the first surface of the second substrate. Each cooling element is substantially aligned with a respective burl.

Abstract: A support such as a clamp (310) is configured to releasably hold a patterning device such as a reticle (300) to secure it and prevent heat-induced deformation of it. For example, an electrostatic clamp includes a first substrate (312) having opposing first (313) and second (315) surfaces, a plurality of burls (316) located on the first surface and configured to contact the reticle, a second substrate (314) having opposing first (317) and second (319) surfaces. The first surface of the second substrate is coupled to the second surface of the first substrate. A plurality of cooling elements (318) are located between the first surface of the second substrate and the second surface of the first substrate. The cooling elements are configured to cause electrons to travel from the second surface of the first substrate to the first surface of the second substrate. Each cooling element is substantially aligned with a respective burl.

Abstract: Described herein are methods and systems for reducing, preventing, or eliminating wrinkles in a paper sheet during papermaking. The systems may include a dryer configured to dry a continuous paper sheet having a travel direction. The system may also include at least one roll configured to receive the dried continuous paper sheet. The systems may also include an air spreader located downstream of the dryer and upstream of the at least one roll. The at least one roll may include one or more calendering rolls. The air spreader may include a plurality of nozzles configured to expel a gas toward the dried sheet. The nozzles may be oriented in a direction at least partially opposed to the travel direction of the dried sheet.

Abstract: Described herein are methods and systems for reducing, preventing, or eliminating wrinkles in a paper sheet during papermaking. The systems may include a dryer configured to dry a continuous paper sheet having a travel direction. The system may also include at least one roll configured to receive the dried continuous paper sheet. The systems may also include an air spreader located downstream of the dryer and upstream of the at least one roll. The at least one roll may include one or more calendering rolls. The air spreader may include a plurality of nozzles configured to expel a gas toward the dried sheet. The nozzles may be oriented in a direction at least partially opposed to the travel direction of the dried sheet.

Abstract: Described herein are methods and systems for reducing, preventing, or eliminating wrinkles in a paper sheet during papermaking. The systems may include a dryer configured to dry a continuous paper sheet having a travel direction. The system may also include at least one roll configured to receive the dried continuous paper sheet. The systems may also include an air spreader located downstream of the dryer and upstream of the at least one roll. The at least one roll may include one or more calendering rolls. The air spreader may include a plurality of nozzles configured to expel a gas toward the dried sheet. The nozzles may be oriented in a direction at least partially opposed to the travel direction of the dried sheet.

Abstract: A support such as a clamp (310) is configured to releasably hold a patterning device such as a reticle (300) to secure it and prevent heat-induced deformation of it. For example, an electrostatic clamp includes a first substrate (312) having opposing first (313) and second (315) surfaces, a plurality of burls (316) located on the first surface and configured to contact the reticle, a second substrate (314) having opposing first (317) and second (319) surfaces. The first surface of the second substrate is coupled to the second surface of the first substrate. A plurality of cooling elements (318) are located between the first surface of the second substrate and the second surface of the first substrate. The cooling elements are configured to cause electrons to travel from the second surface of the first substrate to the first surface of the second substrate. Each cooling element is substantially aligned with a respective burl.

Abstract: A valve device is disclosed for controlling the delivery of gas from a pressurised source suitable for use in a pneumatic ejector in particle sorting apparatus. It uses a diaphragm as a valve member disposed over an output port from a chamber which is in substantially continuous communication with a source of gas or air under pressure. Both sides of the diaphragm are exposed to pressurised gas or air in the chamber. For this reason, and because the diaphragm itself engages the output port to close it, when the input pressure is applied there is a differential pressure which elastically deforms the diaphragm to close the output port. The diaphragm has a piezoelectric element, and the valve device includes an electric circuit operable to selectively activate the piezoelectric element and withdraw the valve member from the output port to admit pressurised gas or air thereinto.