Patents by Inventor Kenneth Durden

Kenneth Durden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method of characterizing micro-fabrication processes
    Patent number: 10024804
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: July 17, 2018
    Assignee: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES
    Publication number: 20170254757
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Application
    Filed: May 22, 2017
    Publication date: September 7, 2017
    Applicant: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • System and method of characterizing micro-fabrication processes
    Patent number: 9658169
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: May 23, 2017
    Assignee: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES
    Publication number: 20150316487
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Application
    Filed: March 14, 2014
    Publication date: November 5, 2015
    Applicant: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • SYSTEM AND METHOD OF CHARACTERIZING MICRO-FABRICATION PROCESSES
    Publication number: 20140320635
    Abstract: A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
    Type: Application
    Filed: March 14, 2014
    Publication date: October 30, 2014
    Applicant: Rudolph Technologies, Inc.
    Inventors: John Thornell, Steven Knauber, Jatinder Dhaliwal, Justin Miller, Michael Grant, Kenneth Durden
  • All surface data for use in substrate inspection
    Patent number: 7835566
    Abstract: A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.
    Type: Grant
    Filed: September 9, 2009
    Date of Patent: November 16, 2010
    Assignee: Rudolph Technologies, Inc.
    Inventors: David Reich, Kenneth Durden, Randall Shay
  • ALL SURFACE DATA FOR USE IN SUBSTRATE INSPECTION
    Publication number: 20100067779
    Abstract: A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.
    Type: Application
    Filed: September 9, 2009
    Publication date: March 18, 2010
    Applicant: Rudolph Technologies, Inc.
    Inventors: David Reich, Kenneth Durden, Randall Shay
  • All surface data for use in substrate inspection
    Patent number: 7593565
    Abstract: A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.
    Type: Grant
    Filed: December 7, 2005
    Date of Patent: September 22, 2009
    Assignee: Rudolph Technologies, Inc.
    Inventors: David Reich, Kenneth Durden, Randall Shay
  • All surface data for use in substrate inspection
    Publication number: 20060142971
    Abstract: A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.
    Type: Application
    Filed: December 7, 2005
    Publication date: June 29, 2006
    Inventors: David Reich, Kenneth Durden, Randall Shay