Patents by Inventor Kenneth E. Fegley

Kenneth E. Fegley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6790428
    Abstract: A process for reducing or eliminating NH3/HF/MFz liquid waste melt in the manufacture of NF3 is provided which includes the steps of providing an NF3 reactor for a reaction of F2 with a liquid NH3/HF/MFz mixture that produces NF3, HF, N2 and other nitrogen fluorides as gaseous products and a liquid NH3/HF/MFz mixture as the liquid waste melt. The process further provides for reduction or elimination of the liquid NH3/HF/MFz waste melt produced by the reactor.
    Type: Grant
    Filed: March 20, 2002
    Date of Patent: September 14, 2004
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Athanasios Tsirukis, John Theodore Lileck, Howard Paul Withers, Jr., Kenneth E. Fegley
  • Publication number: 20030180211
    Abstract: A process for reducing or eliminating NH3/HF/MFz liquid waste melt in the manufacture of NF3 is provided which includes the steps of providing an NF3 reactor for a reaction of F2 with a liquid NH3/HF/MFz mixture that produces NF3, HF, N2 and other nitrogen fluorides as gaseous products and a liquid NH3/HF/MFz mixture as the liquid waste melt. The process further provides for reduction or elimination of the liquid NH3/HF/MFz waste melt produced by the reactor.
    Type: Application
    Filed: March 20, 2002
    Publication date: September 25, 2003
    Inventors: Athanasios Tsirukis, John Theodore Lileck, Howard Paul Withers, Kenneth E. Fegley