Abstract: Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.

Abstract: Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.

Abstract: Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.

Abstract: Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.

Abstract: Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.

Abstract: Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.

Abstract: A field emission display apparatus has an emitter plate 2 having a plurality of column conductors 9 intersecting a plurality of row conductors 6, and electron emitters 5 at the intersection of each of the row and column conductors. An anode plate 62 is adjacent to the emitter plate 2, the anode plate 62 comprising conductive stripes 50 which are alternately covered by material luminescing in the three primary colors. The conductive stripes 50 covered by the same luminescent material are electrically interconnected to form comb-like structures corresponding to each of the colors. The anode plate 62 contains an active region 58 and the buses 82, 84, 86 have a non-uniform width.

Abstract: In a system (12) wherein articles are manufactured by a plurality of process steps (20, 22, & 24), a method for identifying causes of variations in performance of the manufactured articles is provided. The method includes tracking orientation data (48) for the articles during each of the process steps (20, 22, & 24) and then measuring (50) performance data for each of the articles. The method also includes preparing surface performance characteristic maps (54) for each of the articles from the performance data and ordering the surface performance characteristic maps (56) for each of the articles in accordance with the orientation data for each article at a given process step (20, 22, & 24).

Abstract: A method of fabricating electron emission structures 30 having enhanced emission characteristics. The method comprising the steps of providing a substrate 10 having electron emission structures 5 thereon and having a gate layer 6 over the electron emission structures 5. Then modifying the electron emission structures with a focused beam to create modified electron emission structures 30 with enhanced emission efficiency.

Abstract: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (22) spaced by an insulating spacer (125) from a cathode electrode including a conductive mesh (18). Arrays of microtips (14) are located in mesh spacings (16), within apertures (26) formed in extraction electrode (22) and subcavities (141) formed through apertures (26) in insulating spacer (125). Subcavities (141a) are open to row-adjacent and column-adjacent subcavities (141b, 141c) to form larger main cavities (144). Posts (143) of insulating spacer (125) separate diagonally-adjacent cavities (141d). Subcavities (141) are formed by over-etching a layer of insulating spacer material (25) through apertures (26) before or after forming microtips (14) through the same apertures (26). Over-etching reduces the dielectric constant factor of gate-to-cathode capacitance in the finished structure.

Abstract: A method of fabricating electron emission structures 28 having enhanced emission characteristics. The method comprises the steps of providing a substrate 10 having electron emission structures 5 thereon and having a layer 5" over the electron emission structures. The layer 5" having apertures 30 in alignment with said electron emission structures 5. Then modifying the electron emission structures 5 through the apertures 30 with a directional ion milling beam; thereby creating modified electron emission structures 17,29 with enhanced emission efficiency.

Abstract: In accordance with the principles of the present invention, there is disclosed herein a structure and method of fabricating an anode plate for use in a field emission device. The method comprises the steps of providing a transparent substrate 20 and applying transparent insulative material 28 over the substrate 20. Next, particles of luminescent material 25 are partially embedded in selective areas of the transparent insulative material 28. A layer of electrically conductive material 23 is then applied over the luminescent material 25. The layer of electrically conductive material 23 is abraded so as to remove portions of the layer of electrically conductive material 23 and portions of at least some of the luminescent particles 25.

Abstract: An electron emission apparatus comprising a gate emitter 6 formed as a conductive plate having an aperture 22 and an electron emitter structure 30 formed adjacent the aperture, the electron emission structure 30 having a void defining an emission surface.

Abstract: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (22) spaced by an insulating layer (125) from a cathode electrode including a conductive mesh (18). Hexagonal close-packed arrays (12) of microtips (14) are located in mesh spacings (16), within apertures (26) formed in extraction electrode (22). Microtips (14) are formed on a conductive plate (17) laterally spaced from mesh structure (18) by a resistive layer (15). Insulating layer (125) is etched to connect apertures (26) and place microtips (14) in a common cavity within each mesh spacing (16).

Abstract: A method of fabricating an anode plate 80 for use in a field emission device comprising the steps of providing a substantially transparent substrate 70, depositing a layer of a transparent, electrically conductive material 90 on a surface of the substrate, and then removing portions of said layer of conductive material to leave stripes of said conductive material 90.sub.R, 90.sub.G, 90.sub.B. The stripes of conductive material have a first and second corner 84, 88 distal from the substrate 70. The first and second corners 84, 88 of the stripes of conductive material are rounded and luminescent material 74 is applied on the conductive stripes 90. The first and second corners 84, 88 are rounded by applying voltage to the stripes 90 and then etching the stripes to form the rounded corners 84, 88.

Abstract: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (122, 222) spaced by a dielectric insulating layer (25) from a cathode electrode including a conductive mesh (118, 218). Circular arrays (112) of microtips (14) are located concentrically within mesh spacings (116, 216) on a resistive layer (15), within apertures (26) formed on ring-shaped pads (127, 227) patterned in an extraction electrode (122). Mesh spacings (116) and pads (127) are circular. Mesh spacings (226) and pads (227) are hexagonal. For reduced capacitance, dielectric material (25) is etched from cores (144) of rings (127, 227) and from toroidal regions (148) below rings (127, 227). Mesh spacings (116, 216) are hexagonal close-packed and mesh material (118, 218) is removed from portions (142) of cathode electrode. Y-shaped bridging strips (129') have nodes (146) located over removed cathode electrode portions (142).

Abstract: A multiple model supervisor control system (24) for use in a manufacturing environment (10) including a plurality of model based statistical process control units (14.sub.1 -14.sub.N) associated with equipment (#1-#N) is provided. The multiple model supervisor control system (24) includes a database (16) storing model coefficient shift data representing statistically significant drifts in output measurables that are associated with the model based statistical process control units (14.sub.1 -14.sub.N). A supervisor control unit (26) is coupled to the database (16) and is operable to access the coefficient shift data stored in the database (16). A multiple model map (30) of coefficient shift history is generated by the supervisor control unit (26) and shows the coefficient shift data against a common domain.

Abstract: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (122) spaced by an insulating layer (25) from a cathode electrode including a conductive mesh (118). Circular arrays (112) of microtips (14) are located concentrically within circular mesh spacings (116) on a resistive layer (15), within apertures (26) formed in extraction electrode (122). Microtips (14) are laterally spaced from mesh structure (118) by substantially identical paths of a ballast-providing resistive layer (15), placing all microtips (14) at generally the same potential.

Abstract: A method of fabricating a double level metal (DLM) anode plate for use in a field emission device comprises the steps of providing a transparent substrate 82 having an active region 58 and a bus region 62. Then providing electrically conductive regions 50 on the surface. The conductive regions 50 span the active region 58 and the bus region 62. Next, the surface is coated with an electrically insulating material 94 and then the electrically insulating material 94 is removed from selected portions of the bus region 62, the active region 58, and upper portions of the transparent substrate 82. A first bus 52 is provided for electrically connecting a first series of the conductive regions, a second bus 54 is provided for electrically connecting a second series of the conductive regions, and a third bus 56 is provided for electrically connecting a third series of the conductive regions. Luminescent material of a first color 88.sub.R is applied to the first series of conductive regions 50.sub.

Abstract: An anode plate 40, suitable for use in a field emission display tetrode, includes a transparent planar substrate 42 having thereon a layer 46 of a transparent, electrically conductive material, which comprises the anode electrode of the display tetrode. Barrier structures 48 comprising an electrically insulating, preferably opaque material, are formed on anode electrode 46 as a series of parallel ridges. Atop each barrier structure 48 are a series of electrically conductive stripes 50, which function as deflection electrodes. Luminescent material 52 overlies anode electrode 46 in the channels between barrier structures 48. Conductive stripes 50 are termed into three series such that every third stripe 50 is electrically interconnected. Deflection voltage controller 70 permits selective deflection of electrons toward the proper luminescent material 52.