Patents by Inventor Kenneth Gault

Kenneth Gault has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor metal contamination reduction for ultra-thin gate dielectrics
    Publication number: 20050112888
    Abstract: A bilayer dielectric structure for substantially reducing or eliminating metal contaminants formed during subsequent polysilicon deposition is provided. The bilayer dielectric structure includes an upper surface region that is rich in chlorine located atop a bottom surface region. The upper surface region that is rich in chlorine removes metal contaminates that are present atop the structure during subsequent formation of a polysilicon layer. A method of forming the bilayer structure is also provided.
    Type: Application
    Filed: November 4, 2004
    Publication date: May 26, 2005
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Jay Burnham, James Elliott, Kenneth Gault, Mousa Ishaq, Steven Shank, Mary St. Lawrence