Patents by Inventor Kenneth H. Adams

Kenneth H. Adams has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4976612
    Abstract: A purge tube for protecting a boat(s) of wafers. This purge tube does not enter the furnace. A floating end cap within the tube moves to substantially seal the furance opening during processing. The floating end cap is withdrawn back to the closed end of the tube when the wafer boat(s) is withdrawn into the tube.
    Type: Grant
    Filed: June 20, 1989
    Date of Patent: December 11, 1990
    Assignee: Automated Wafer Systems
    Inventor: Kenneth H. Adams
  • Patent number: D284060
    Type: Grant
    Filed: May 18, 1983
    Date of Patent: June 3, 1986
    Inventor: Kenneth H. Adams