Abstract: A spectrophotometer includes a plurality of sensor elements arranged together, each sensor element including a filter; a light sensor optically coupled with an output of the filter; and a barrier that surrounds the filter and light sensor and a space between the filter and light sensor. For each sensor element, the barrier blocks light that has not passed through the filter from reaching the light sensor including such that light from one sensor element is not detected by another of the sensor elements.

Abstract: Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication may include producing a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication may include producing electrical connections between plates and producing circuitry to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.

Abstract: A micro-electromechanical systems (MEMS) device includes bottom and top capacitive plates, such that a capacitor is definable therebetween. A mechanism is electrostatically movably disposed between the bottom and top capacitive plates. One or more flexures are movably disposed between the bottom capacitive plate and the mechanism, and having distance stops between the bottom capacitive plate and the mechanism corresponding to maximum downward movement. The MEMS device includes one or more electrodes of the bottom capacitive plate corresponding to the flexures. Energizing different of the electrodes causes the flexures to move to different of the distance stops, causing the mechanism to move to different positions between the bottom and top capacitive plates.

Abstract: A light modulator device includes a bottom charge plate, a top charge plate, and a pixel plate supported by at least one flexure, wherein the flexure is a piece-wise linear flexure.

Abstract: Embodiments of a spectrophotometer and methods of use a spectrophotometer are disclosed.

Abstract: A micro-electromechanical systems (MEMS) device includes bottom and top capacitive plates, such that a capacitor is definable therebetween. A mechanism is electrostatically movably disposed between the bottom and top capacitive plates. One or more flexures are movably disposed between the bottom capacitive plate and the mechanism, and having distance stops between the bottom capacitive plate and the mechanism corresponding to maximum downward movement. The MEMS device includes one or more electrodes of the bottom capacitive plate corresponding to the flexures. Energizing different of the electrodes causes the flexures to move to different of the distance stops, causing the mechanism to move to different positions between the bottom and top capacitive plates.

Abstract: A light modulator device includes a bottom charge plate; a pixel plate supported by at least one flexure, wherein the flexure is located substantially below said pixel plate, and a top charge plate.