Patents by Inventor Kenneth J. Mockler

Kenneth J. Mockler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Anti-corrosion treatment for patterning of metallic layers
    Patent number: 4668335
    Abstract: An improved method is provided for defining interconnect patterns in an integrated circuit fabricated on a semiconductor wafer. The improvement comprises the step of immersing the wafer in a weak base solution, prior to etching a titanium-tungsten barrier layer, so as to remove from the wafer chlorides and flourides remaining as a result of a previous step of etching a conductor layer. In a preferred embodiment of the invention, a step of immersing the wafer in a strong acid solution is also performed to remove chlorides from the wafer.
    Type: Grant
    Filed: August 30, 1985
    Date of Patent: May 26, 1987
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Kenneth J. Mockler, Richard C. Kittler, Glenn S. Warner, Howard F. Hsu