Abstract: A thin film tin-oxide heater (10) including an annular inner heat region (12), an annular outer heat region (14), a first silver buss bar (16), and a second silver buss bar (18). The radius (r2) between the inner and outer heat regions is selected so that the resistance per unit square and power per unit area for the inner heat region approximates the resistance per unit square and power per unit area for the outer heat region.

Abstract: What is disclosed is an injector of the type commonly used in atmospheric pressure chemical vapor deposition equipment. The injector includes a number of plates with a number of linear hole arrays. The plates are layered in order to produce a number of cascaded holes arrays. The layered plates define a hole matrix. A chute is positioned beneath the hole matrix. On both sides of the chute is a cooling plate. The chute includes a passage, the regions between the cooling plate and the chute form ducts. The top of the hole matrix receives a number of gases and discretely conveys them to the top of the individual cascaded hole arrays. The gaseous chemicals are then forced through the cascaded hole arrays which induces the gases to flow in an increasingly uniform manner. The gases are then individually fed to the passage and ducts which convey them to a region above the surface where the gases are exposed to one another, react and form a layer on the surface.