Patents by Inventor Kenneth P. Garcia

Kenneth P. Garcia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6168085
    Abstract: A system and method are provided for controlling temperature and humidity of an environment for a process chamber for semiconductor manufacturing materials. A supply of filtered, temperature and humidity controlled gaseous working fluid is provided to a process chamber, and is controlled by cascade control based upon sensing of environmental parameters to be controlled both upstream and downstream of a chemical filter, which can be a charcoal filter. A controller determines a first control error output by comparing a desired process parameter set point for the controlled environmental parameter of the gaseous working fluid with the first sensed value, determines a second set point from the first control error, and controls the supply of the temperature and humidity controlled gaseous working fluid based upon the second set point.
    Type: Grant
    Filed: December 14, 1999
    Date of Patent: January 2, 2001
    Assignee: Semifab Incorporated
    Inventor: Kenneth P. Garcia