Patents by Inventor Kenneth Reis

Kenneth Reis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching metals using chlorine gas and hydrochloric gas in de-ionized water
    Patent number: 5795492
    Abstract: A metal, such as Platinum, is stripped from a wafer during processing of an integrated circuit. The wafer, typically within a cassette of wafers, is submerged in de-ionized water. The de-ionized water is, for example, held within a container made of quartz. Optimally, the de-ionized water is heated, for example, to a temperature of 80 degrees Centigrade. Chlorine gas and hydrochloric acid gas are bubbled into the de-ionized water to oxidize the metal.
    Type: Grant
    Filed: April 30, 1997
    Date of Patent: August 18, 1998
    Assignee: VLSI Technology, Inc.
    Inventors: Kenneth Reis, Allen Page