Abstract: Systems and methods for generating images of an object having a known object velocity include imaging electromagnetic radiation from the object onto a sensor array of an imaging system, adjusting at least one of a shutter rate and a shutter direction of the imaging system in accordance with an image velocity of the image across the sensor array, and sampling output of the sensor array in accordance with the shutter rate and the shutter direction to generate the images. Systems and methods for generating images of an object moving through a scene include a first imaging system generating image data samples of the scene, a post processing system that analyzes the samples to determine when the object is present in the scene, and one or more second imaging systems triggered by the post processing system to generate one or more second image data samples of the object.

Abstract: Systems and methods for image data fusion include providing first and second sets of image data corresponding to an imaged first and second scene respectively. The scenes at least partially overlap in an overlap region, defining a first collection of overlap image data as part of the first set of image data, and a second collection of overlap image data as part of the second set of image data. The second collection of overlap image data is represented as a plurality of image data subsets such that each of the subsets is based on at least one characteristic of the second collection, and each subset spans the overlap region. A fused set of image data is produced by an image processor, by modifying the first collection of overlap image data based on at least a selected one of, but less than all of, the image data subsets.

Abstract: Systems and methods include optics having one or more phase modifying elements that modify wavefront phase to introduce image attributes into an optical image. A detector converts the optical image to electronic data while maintaining the image attributes. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets, and independently processes the data sets to form processed electronic data. The processing may optionally be nonlinear. Other imaging systems and methods include optics having one or more phase modifying elements that modify wavefront phase to form an optical image. A detector generates electronic data having one or more image attributes that are dependent on characteristics of the phase modifying elements and/or the detector. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets and independently processes the data sets to form processed electronic data.

Abstract: Systems and methods for generating images of an object having a known object velocity include imaging electromagnetic radiation from the object onto a sensor array of an imaging system, adjusting at least one of a shutter rate and a shutter direction of the imaging system in accordance with an image velocity of the image across the sensor array, and sampling output of the sensor array in accordance with the shutter rate and the shutter direction to generate the images. Systems and methods for generating images of an object moving through a scene include a first imaging system generating image data samples of the scene, a post processing system that analyzes the samples to determine when the object is present in the scene, and one or more second imaging systems triggered by the post processing system to generate one or more second image data samples of the object.

Abstract: Systems and methods for generating images of an object having a known object velocity include imaging electromagnetic radiation from the object onto a sensor array of an imaging system, adjusting at least one of a shutter rate and a shutter direction of the imaging system in accordance with an image velocity of the image across the sensor array, and sampling output of the sensor array in accordance with the shutter rate and the shutter direction to generate the images. Systems and methods for generating images of an object moving through a scene include a first imaging system generating image data samples of the scene, a post processing system that analyzes the samples to determine when the object is present in the scene, and one or more second imaging systems triggered by the post processing system to generate one or more second image data samples of the object.

Abstract: Systems and methods include optics having one or more phase modifying elements that modify wavefront phase to introduce image attributes into an optical image. A detector converts the optical image to electronic data while maintaining the image attributes. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets, and independently processes the data sets to form processed electronic data. The processing may optionally be nonlinear. Other imaging systems and methods include optics having one or more phase modifying elements that modify wavefront phase to form an optical image. A detector generates electronic data having one or more image attributes that are dependent on characteristics of the phase modifying elements and/or the detector. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets and independently processes the data sets to form processed electronic data.

Abstract: An imaging system includes a detector for receiving electromagnetic energy and generating sampled data in accordance with the electromagnetic energy so received. The detector is characterized by a threshold point such that the sampled data is in one of two states: i) below threshold, when the intensity of the electromagnetic energy so received is less than the threshold point; and ii) above threshold, when the intensity of the electromagnetic energy is greater than the threshold point. The imaging system also includes saturation optics for providing a characteristic of the sampled data, wherein the characteristic of the sampled data when below threshold is different from the characteristic of the sampled data when above threshold.

Abstract: Systems and methods for generating images of an object having a known object velocity include imaging electromagnetic radiation from the object onto a sensor array of an imaging system, adjusting at least one of a shutter rate and a shutter direction of the imaging system in accordance with an image velocity of the image across the sensor array, and sampling output of the sensor array in accordance with the shutter rate and the shutter direction to generate the images. Systems and methods for generating images of an object moving through a scene include a first imaging system generating image data samples of the scene, a post processing system that analyzes the samples to determine when the object is present in the scene, and one or more second imaging systems triggered by the post processing system to generate one or more second image data samples of the object.

Abstract: Systems and methods include optics having one or more phase modifying elements that modify wavefront phase to introduce image attributes into an optical image. A detector converts the optical image to electronic data while maintaining the image attributes. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets, and independently processes the data sets to form processed electronic data. The processing may optionally be nonlinear. Other imaging systems and methods include optics having one or more phase modifying elements that modify wavefront phase to form an optical image. A detector generates electronic data having one or more image attributes that are dependent on characteristics of the phase modifying elements and/or the detector. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets and independently processes the data sets to form processed electronic data.

Abstract: An imaging system includes optics foi foiming an optical image, that provide a first region m the optical image that is charactenzed by a fust range of best focus and a second region in the optical image that is characterized by a second range of best focus The first and second ianges correspond to object distance ranges that are discontiguous A sensor array converts the optical image to a data stream, and a digital signal processor processes the data stream to generate a final image.

Abstract: Systems and methods include optics having one or more phase modifying elements that modify wavefront phase to introduce image attributes into an optical image. A detector converts the optical image to electronic data while maintaining the image attributes. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets, and independently processes the data sets to form processed electronic data. The processing may optionally be nonlinear. Other imaging systems and methods include optics having one or more phase modifying elements that modify wavefront phase to form an optical image. A detector generates electronic data having one or more image attributes that are dependent on characteristics of the phase modifying elements and/or the detector. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets and independently processes the data sets to form processed electronic data.

Abstract: Systems and methods for image data fusion include providing first and second sets of image data corresponding to an imaged first and second scene respectively. The scenes at least partially overlap in an overlap region, defining a first collection of overlap image data as part of the first set of image data, and a second collection of overlap image data as part of the second set of image data. The second collection of overlap image data is represented as a plurality of image data subsets such that each of the subsets is based on at least one characteristic of the second collection, and each subset spans the overlap region. A fused set of image data is produced by an image processor, by modifying the first collection of overlap image data based on at least a selected one of, but less than all of, the image data subsets.

Abstract: An optical lithography system that has extended depth of focus exposes a photoresist coating on a wafer, and includes an illumination sub-system, a reticle, and an imaging lens that has a pupil plane function to form an aerial image of the reticle proximate to the photoresist. The pupil plane function provides the extended depth of focus such that the system may be manufactured or used with relaxed tolerance, reduced cost and/or increased throughput. The system may be used to form precise vias within integrated circuits even in the presence of misfocus or misalignment.

Abstract: A software product includes instructions stored on computer-readable media, that when executed by a computer, perform steps for optimizing an optical system design and a digital system design. The instructions are for simulating an optical model of the optical system design, simulating a digital model of the digital system design, analyzing simulated output of the optical model and simulated output of the digital model, to produce a score, modifying the optical model and the digital model, based upon the score, controlling re-execution of the instructions for simulating the optical model, the instructions for simulating the digital model, the instructions for analyzing and the instructions for modifying to produce an optimized optical model and an optimized digital model, and outputting predicted performance of the optimized optical and digital models.

Abstract: An optical lithography system that has extended depth of focus exposes a photoresist coating on a wafer, and includes an illumination sub-system, a reticle, and an imaging lens that has a pupil plane function to form an aerial image of the reticle proximate to the photoresist. The pupil plane function provides the extended depth of focus such that the system may be manufactured or used with relaxed tolerance, reduced cost and/or increased throughput. The system may be used to form precise vias within integrated circuits even in the presence of misfocus or misalignment.

Abstract: Systems and methods include optics having one or more phase modifying elements that modify wavefront phase to introduce image attributes into an optical image. A detector converts the optical image to electronic data while maintaining the image attributes. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets, and independently processes the data sets to form processed electronic data. The processing may optionally be nonlinear. Other imaging systems and methods include optics having one or more phase modifying elements that modify wavefront phase to form an optical image. A detector generates electronic data having one or more image attributes that are dependent on characteristics of the phase modifying elements and/or the detector. A signal processor subdivides the electronic data into one or more data sets, classifies the data sets and independently processes the data sets to form processed electronic data.

Abstract: An imaging system includes a detector for receiving electromagnetic energy and generating sampled data in accordance with the electromagnetic energy so received. The detector is characterized by a threshold point such that the sampled data is in one of two states: i) below threshold, when the intensity of the electromagnetic energy so received is less than the threshold point; and ii) above threshold, when the intensity of the electromagnetic energy is greater than the threshold point. The imaging system also includes saturation optics for providing a characteristic of the sampled data, wherein the characteristic of the sampled data when below threshold is different from the characteristic of the sampled data when above threshold.

Abstract: A software product includes instructions stored on computer-readable media, that when executed by a computer, perform steps for optimizing an optical system design and a digital system design. The instructions are for simulating an optical model of the optical system design, simulating a digital model of the digital system design, analyzing simulated output of the optical model and simulated output of the digital model, to produce a score, modifying the optical model and the digital model, based upon the score, controlling re-execution of the instructions for simulating the optical model, the instructions for simulating the digital model, the instructions for analyzing and the instructions for modifying to produce an optimized optical model and an optimized digital model, and outputting predicted performance of the optimized optical and digital models.

Abstract: A system, method and software product to optimize optical and/or digital system designs. An optical model of the optical system design is generated. A digital model of the digital system design is generated. Simulated output of the optical and digital models is analyzed to produce a score. The score is processed to determine whether the simulated output achieves one or more goals. One or more properties of at least one of the optical model and the digital model is modified if the goals are not achieved. The analyzing, processing and modifying is repeated until the goals are achieved, and an optimized optical system design and optimized digital system design are generated from the optical and digital models.

Abstract: An optical lithography system that has extended depth of focus exposes a photoresist coating on a wafer, and includes an illumination sub-system, a reticle, and an imaging lens that has a pupil plane function to form an aerial image of the reticle proximate to the photoresist. The pupil plane function provides the extended depth of focus such that the system may be manufactured or used with relaxed tolerance, reduced cost and/or increased throughput. The system may be used to form precise vias within integrated circuits even in the presence of misfocus or misalignment.