Patents by Inventor Kenneth Stein

Kenneth Stein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7202764
    Abstract: A semiconductor micro-electromechanical system (MEMS) switch provided with noble metal contacts that act as an oxygen barrier to copper electrodes is described. The MEMS switch is fully integrated into a CMOS semiconductor fabrication line. The integration techniques, materials and processes are fully compatible with copper chip metallization processes and are typically, a low cost and a low temperature process (below 400° C.). The MEMS switch includes: a movable beam within a cavity, the movable beam being anchored to a wall of the cavity at one or both ends of the beam; a first electrode embedded in the movable beam; and a second electrode embedded in an wall of the cavity and facing the first electrode, wherein the first and second electrodes are respectively capped by the noble metal contact.
    Type: Grant
    Filed: July 8, 2003
    Date of Patent: April 10, 2007
    Assignee: International Business Machines Corporation
    Inventors: Hariklia Deligianni, Panayotis Andricacos, L. Paivikki Buchwalter, John M. Cotte, Christopher Jahnes, Mahadevaiyer Krishnan, John H. Magerlein, Kenneth Stein, Richard P. Volant, James A. Tornello, Jennifer Lund
  • Publication number: 20060270247
    Abstract: Methods of forming a high dielectric constant dielectric layer are disclosed including providing a process chamber including a holder for supporting a substrate, introducing a first gas comprising a high dielectric constant (Hi-K) dielectric precursor and an oxygen (O2) oxidant into the process chamber to form a first portion of the high dielectric constant dielectric layer on the substrate, and switching from a flow of the first gas to a flow of a second gas comprising the Hi-K dielectric precursor and an ozone (O3) oxidant to form a second portion of the high dielectric constant dielectric layer on the first portion. In an alternative embodiment, another portion can be formed on the second portion using the oxygen oxidant. The invention increases throughput by at least 20% without reliability or leakage degradation and without the need for additional equipment.
    Type: Application
    Filed: May 26, 2005
    Publication date: November 30, 2006
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Douglas Coolbaugh, Ebenezer Eshun, Kenneth Stein, Kunal Vaed
  • Publication number: 20060164194
    Abstract: A semiconductor micro-electromechanical system (MEMS) switch provided with noble metal contacts that act as an oxygen barrier to copper electrodes is described. The MEMS switch is fully integrated into a CMOS semiconductor fabrication line. The integration techniques, materials and processes are fully compatible with copper chip metallization processes and are typically, a low cost and a low temperature process (below 400° C.). The MEMS switch includes: a movable beam within a cavity, the movable beam being anchored to a wall of the cavity at one or both ends of the beam; a first electrode embedded in the movable beam; and a second electrode embedded in an wall of the cavity and facing the first electrode, wherein the first and second electrodes are respectively capped by the noble metal contact.
    Type: Application
    Filed: February 21, 2006
    Publication date: July 27, 2006
    Inventors: Hariklia Deligianni, Panayotis Andricacos, L. Paivikki Buchwalter, John Cotte, Christopher Jahnes, Mahadevaiyer Krishnan, John Magerlein, Kenneth Stein, Richard Volant, James Tornello, Jennifer Lund
  • Patent number: D527014
    Type: Grant
    Filed: February 3, 2006
    Date of Patent: August 22, 2006
    Assignee: Microsoft Corporation
    Inventors: Martijn E. Van Tilburg, Robert Kenneth Stein, III, Jeffrey Weir, Orry Soegiono
  • Patent number: D533872
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: December 19, 2006
    Assignee: Microsoft Corporation
    Inventors: Mark R. Ligameri, Jenny T. Lam, Greg S. Melander, Robert Kenneth Stein, III, Charles Cummins, William Mak
  • Patent number: D536003
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: January 30, 2007
    Assignee: Microsoft Corporation
    Inventors: Paul Gusmorino, Mark R. Ligameri, Jenny T. Lam, Greg S. Melander, Robert Kenneth Stein, III, Charles W. Stabb
  • Patent number: D537087
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: February 20, 2007
    Assignee: Microsoft Corporation
    Inventors: Paul Gusmorino, Mark R. Ligameri, Jenny T. Lam, Greg S. Melander, Robert Kenneth Stein, III, Charles W. Stabb
  • Patent number: D537835
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: March 6, 2007
    Assignee: Microsoft Corporation
    Inventors: Paul Gusmorino, Mark R. Ligameri, Jenny T. Lam, Greg S. Melander, Robert Kenneth Stein, III, Charles W. Stabb
  • Patent number: D540812
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: April 17, 2007
    Assignee: Microsoft Corporation
    Inventors: Paul Gusmorino, Mark R. Ligameri, Jenny T. Lam, Greg S. Melander, Robert Kenneth Stein, III
  • Patent number: D545325
    Type: Grant
    Filed: September 8, 2006
    Date of Patent: June 26, 2007
    Assignee: Microsoft Corporation
    Inventors: Bryan Pieratt, Luciana Bordallo Misura, Robert Kenneth Stein, Robert Ward Massa, Adrienne E. O'Donnell, Michael A. LaJoie, Jenny T. Lam
  • Patent number: D549234
    Type: Grant
    Filed: April 24, 2007
    Date of Patent: August 21, 2007
    Assignee: Microsoft Corporation
    Inventors: Adrienne E. O'Donnell, Michael A. LaJoie, Robert Kenneth Stein, Martijn van Tilburg, Tjeerd Hoek, Aaron Wesley Cunningham
  • Patent number: D549236
    Type: Grant
    Filed: April 24, 2007
    Date of Patent: August 21, 2007
    Assignee: Microsoft Corporation
    Inventors: Adrienne E. O'Donnell, Michael A. LaJoie, Robert Kenneth Stein, Paul Gusmorino, Mark Ligameri, Jenny Lam, Greg S. Melander, Talos Shu-Ming Tsui
  • Patent number: D549730
    Type: Grant
    Filed: April 24, 2007
    Date of Patent: August 28, 2007
    Assignee: Microsoft Corporation
    Inventors: Adrienne E. O'Donnell, Michael A. LaJoie, Robert Kenneth Stein
  • Patent number: D550238
    Type: Grant
    Filed: November 16, 2006
    Date of Patent: September 4, 2007
    Assignee: Microsoft Corporation
    Inventors: Jenny T. Lam, Robert Kenneth Stein
  • Patent number: D550697
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: September 11, 2007
    Assignee: Microsoft Corporation
    Inventors: Paul Gusmorino, Mark R. Ligameri, Jenny T. Lam, Greg S. Melander, Robert Kenneth Stein, III, Marieke Iwema Watson
  • Patent number: D550699
    Type: Grant
    Filed: September 8, 2006
    Date of Patent: September 11, 2007
    Assignee: Microsoft Corporation
    Inventors: Bryan Pieratt, Luciana Bordallo Misura, Robert Kenneth Stein, Robert Ward Massa, Adrienne E. O'Donnell, Michael A. LaJoie, Jenny T. Lam
  • Patent number: D551245
    Type: Grant
    Filed: September 8, 2006
    Date of Patent: September 18, 2007
    Assignee: Microsoft Corporation
    Inventors: Bryan Pieratt, Luciana Bordallo Misura, Robert Kenneth Stein, Robert Ward Massa, Adrienne E. O'Donnell, Michael A. LaJoie, Jenny T. Lam
  • Patent number: D551248
    Type: Grant
    Filed: September 8, 2006
    Date of Patent: September 18, 2007
    Assignee: Microsoft Corporation
    Inventors: Bryan Pieratt, Luciana Bordallo Misura, Robert Kenneth Stein, Robert Ward Massa, Adrienne E. O'Donnell, Michael A. LaJoie, Jenny T. Lam
  • Patent number: D551677
    Type: Grant
    Filed: September 8, 2006
    Date of Patent: September 25, 2007
    Assignee: Microsoft Corporated
    Inventors: Bryan Pieratt, Luciana Bordallo Misura, Robert Kenneth Stein, Robert Ward Massa, Adrienne E. O'Donnell, Michael A. LaJoie, Jenny T. Lam
  • Patent number: D551678
    Type: Grant
    Filed: September 8, 2006
    Date of Patent: September 25, 2007
    Assignee: Microsoft Corporation
    Inventors: Bryan Pieratt, Luciana Bordallo Misura, Robert Kenneth Stein, Robert Ward Massa, Michael A. LaJoie, Jenny T. Lam, Denise Michele Trabona, Adrienne E. O'Donnell