Patents by Inventor Kenneth Swan

Kenneth Swan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hybrid fuzzy closed-loop sub-micron critical dimension control in wafer manufacturing
    Patent number: 6556876
    Abstract: Variation in results of a semiconductor fabrication process is minimized by adjusting process parameters utilizing a fuzzy-controlled learning feedback system. The fuzzy-controlled learning system receives as inputs the results of the fabrication process and then converts these results into a fuzzy set defined by a membership function. An inference engine applies a fuzzy rule base to map an output fuzzy set from the input fuzzy set. The fuzzy output set is then converted to crisp outputs which automatically adjusts parameters of the fabrication process in order to minimize variation.
    Type: Grant
    Filed: October 12, 2000
    Date of Patent: April 29, 2003
    Assignee: National Semiconductor Corporation
    Inventors: Hank Prosack, Patrick H. Ferland, Kenneth Swan