Patents by Inventor Kenneth Vavala

Kenneth Vavala has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing grooved chemical mechanical polishing layers
    Patent number: 9034063
    Abstract: A method of manufacturing grooved polishing layers for use in chemical mechanical polishing pads is provided, wherein the formation of defects in the polishing layers are minimized.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: May 19, 2015
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Jeffrey James Hendron, Kenneth Vavala, Jeffrey Borcherdt Miller, Brian T. Cantrell, James T. Murnane, Kathleen McHugh, George H. McClain, Durron A. Hutt, Robert A. Brady, Christopher A. Young
  • Method of manufacturing grooved chemical mechanical polishing layers
    Publication number: 20140083018
    Abstract: A method of manufacturing grooved polishing layers for use in chemical mechanical polishing pads is provided, wherein the formation of defects in the polishing layers are minimized.
    Type: Application
    Filed: September 27, 2012
    Publication date: March 27, 2014
    Applicant: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Jeffrey James Hendron, Kenneth Vavala, Jeffrey Borcherdt Miller, Brian T. Cantrell, James T. Murnane, Kathleen McHugh, George H. McClain, Durron A. Hutt, Robert A. Brady, Christopher A. Young