Abstract: Systems and methods for heat exchange in accordance with the invention define adequately long-interchange distances for two fluids by wrapping a tube containing a first fluid about the wall of an inner cylindrical tank, within a gap formed with a second concentric tank. A second fluid is transmitted in the space defined between the turns of the tube and the two walls, providing effective short length thermal interchange through the tube walls. The tube is in the line contact with both tank walls and the fluids can flow rapidly over an adequately long length, so that high efficiency is provided in a low cost system.

Abstract: Techniques for gathering platform information are described. The platform information describes the environment in which a program executes. The platform information includes software component information and system configuration information uniquely identifying a particular instance of an environment. This information is stored collectively in the database over a period of time. This data is then analyzed and available for performing queries for example such as regarding test coverage and may be used to reproduce software faults.

Abstract: In many processes used in fabricating semiconductors the wafer is seated on the top surface of a pedestal and heated in a high energy process step, such as plasma etching. The pedestal, chuck or platen may be cooling but the wafer gradually heats until the process can no longer continue. Where large, e.g. 300 mm diameter, wafers are being processed the temperature level across the wafer is difficult to maintain substantially constant. In this system and method the lateral temperature distribution is equalized by a heat sink structure in a chamber immediately under the wafer support on top of the pedestal. A number of spatially distributed wicking posts extend downwardly from a layer of wicking material across the top of the chamber, into a pool of a vaporizable liquid. At hot spots, vaporized liquid is generated and transported to adjacent condensation posts extending up from the liquid. The system thus passively extracts heat to equalize temperatures while recirculating liquid and assuring adequate supply.

Abstract: A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

Abstract: A system and method for maintaining the temperature of a thermal transfer fluid at a selectable level within a wide temperature range, so as to operate a process tool in a chosen mode employing at lease two cascaded stages, each operating with a different fluid in a separate refrigeration cycle. By interrelating energy transfers between parts of upper and lower stages, thermal efficiency is maximized and a smooth continuum of temperature levels can be provided. The refrigerants advantageously have vaporization points below and above ambient, for upper and lower stages respectively, and employs the upper stage for a constant refrigeration capacity, controlling the final temperature with the lower stage. The system allows for a further extension of range because the thermal transfer fluid can be heated for some process tool modes as the refrigeration cycles are run at low loads.

Abstract: A system and method for maintaining the temperature of a thermal transfer fluid at a selectable level within a wide temperature range, so as to operate a process tool in a chosen mode employing at least two cascaded stages, each operating with a different fluid in a separate refrigeration cycle. By interrelating energy transfers between parts of upper and lower stages, thermal efficiency is maximized and a smooth continuum of temperature levels can be provided. The refrigerants advantageously have vaporization points below and above ambient, for upper and lower stages respectively, and employs the upper stage for a constant refrigeration capacity, controlling the final temperature with the lower stage. The system allows for a further extension of range because the thermal transfer fluid can be heated for some process tool modes as the refrigeration cycles are run at low loads.

Abstract: An internal combustion engine using variable compression ratio and variable fuel supply to one of two combustion chambers is presented. Varying the compression ratio is accomplished by changing the volume of a single combustion chamber. This, in combination with lean burning, results in a highly efficient prime mover particularly at the low torque outputs needed in passenger car applications. The relationship of compression ratio and fuel feed is varied with engine speed. Burning occurs in two stages, and this results in a clean exhaust. The invention allows very efficient throttling of two-cycle engines to be realized. A concept for supplying air to a two-cycle engine at very good efficiencies is also presented. The combination of these techniques can result in an engine for automotive use that is half the weight of conventional units with a thermal efficiency of 40% or more at average engine output.

Abstract: The problem of controlling the temperature of the different units in a process tool system which have to be cooled or heated using thermal transfer fluid at selected setpoints and flow rates is resolved by a system having multiple modular units each with some operative and form factor commonality but at least dual functional capability. The modular units each have separate recirculation loops for thermal transfer fluid but cool the fluid using refrigeration cycles or facilities water supplies or heat the fluid using compressed hot gases or electrical energy. By employing operative units which can be internally varied to provide different thermal capacities within form factor constraints, the system enables concurrent temperature control needs of a number of different units to be met with an energy efficient, low footprint, highly adaptable system.

Abstract: A motor/pump system which uses an enclosed rotor shell, and also interior hydrodynamic bearings which are lubricated by the liquid being pumped, is arranged to minimize localized heating at the bearings to vaporization levels under high load conditions. To this end output pressure from the pump, which varies with load, is communicated into the rotor interior, without bulk fluid transfer. The increased pressure raises the vaporization temperature, automatically adjusting it with increased load to maintain the hydrodynamic bearing effect.

Abstract: An internal combustion engine using variable compression ratio and variable fuel supply to one of two combustion chambers is presented. Varying the compression ratio is accomplished by changing the volume of a single combustion chamber. This, in combination with lean burning, results in a highly efficient prime mover particularly at the low torque outputs needed in passenger car applications. The relationship of compression ratio and fuel feed is varied with engine speed. Burning occurs in two stages, and this results in a clean exhaust. The invention allows very efficient throttling of two-cycle engines to be realized. A concept for supplying air to a two-cycle engine at very good efficiencies is also presented. The combination of these techniques can result in an engine for automotive use that is half the weight of conventional units with a thermal efficiency of 40% or more at average engine output.

Abstract: An internal combustion engine using variable compression ratio and variable fuel supply to one of two combustion chambers is presented. Varying the compression ratio is accomplished by changing the volume of a single combustion chamber. This, in combination with lean burning, results in a highly efficient prime mover particularly at the low torque outputs needed in passenger car applications. The relationship of compression ratio and fuel feed is varied with engine speed. Burning occurs in two stages, and this results in a clean exhaust. The invention allows very efficient throttling of two-cycle engines to be realized. A concept for supplying air to a two-cycle engine at very good efficiencies is also presented. The combination of these techniques can result in an engine for automotive use that is half the weight of conventional units with a thermal efficiency of 40% or more at average engine output.

Abstract: Techniques for gathering platform information are described. The platform information describes the environment in which a program executes. The platform information includes software component information and system configuration information uniquely identifying a particular instance of an environment. This information is stored collectively in the database over a period of time. This data is then analyzed and available for performing queries for example such as regarding test coverage and may be used to reproduce software faults.

Abstract: In many processes used in fabricating semiconductors the wafer is seated on the top surface of a pedestal and heated in a high energy process step, such as plasma etching. The pedestal, chuck or platen may be cooling but the wafer gradually heats until the process can no longer continue. Where large, e.g. 300 mm diameter, wafers are being processed the temperature level across the wafer is difficult to maintain substantially constant. In this system and method the lateral temperature distribution is equalized by a heat sink structure in a chamber immediately under the wafer support on top of the pedestal. A number of spatially distributed wicking posts extend downwardly from a layer of wicking material across the top of the chamber, into a pool of a vaporizable liquid. At hot spots, vaporized liquid is generated and transported to adjacent condensation posts extending up from the liquid. The system thus passively extracts heat to equalize temperatures while recirculating liquid and assuring adequate supply.

Abstract: A motor/pump system which uses an enclosed rotor shell, and also interior hydrodynamic bearings which are lubricated by the liquid being pumped, is arranged to minimize localized heating at the bearings to vaporization levels under high load conditions. To this end output pressure from the pump, which varies with load, is communicated into the rotor interior, without bulk fluid transfer. The increased pressure raises the vaporization temperature, automatically adjusting it with increased load to maintain the hydrodynamic bearing effect.

Abstract: The problem of controlling the temperature of the different units in a process tool system which have to be cooled or heated using thermal transfer fluid at selected setpoints and flow rates is resolved by a system having multiple modular units each with some operative and form factor commonality but at least dual functional capability. The modular units each have separate recirculation loops for thermal transfer fluid but cool the fluid using refrigeration cycles or facilities water supplies or heat the fluid using compressed hot gases or electrical energy. By employing operative units which can be internally varied to provide different thermal capacities within form factor constraints, the system enables concurrent temperature control needs of a number of different units to be met with an energy efficient, low footprint, highly adaptable system.

Abstract: A temperature control unit for independent control of a number of independent channels, as can exist with a cluster tool used for semiconductor fabrication, has high efficiency, long term life and reliability, and requires only a small floor area. To these ends, the unit employs a single high capacity refrigeration system and disposes a number of separate temperature control channels for the individual tools, with only some channels receiving refrigerant. Low temperature channels use high pressure, sub-cooled refrigerant for chilling the heat transfer fluid to selected levels controlled by proportional valves adjusting refrigerant flow through evaporator heat exchanger units which cool heat transfer fluid. Moderate temperature channels cool the heat transfer fluid for associated tools to an ambient temperature level.

Abstract: An internal combustion engine using variable compression ratio and variable fuel supply to one of two combustion chambers is presented. Varying the compression ratio is accomplished by changing the volume of a single combustion chamber. This, in combination with lean burning, results in a highly efficient prime mover particularly at the low torque outputs needed in passenger car applications. The relationship of compression ratio and fuel feed is varied with engine speed. Burning occurs in two stages, and this results in a clean exhaust. The invention allows very efficient throttling of two-cycle engines to be realized. A concept for supplying air to a two-cycle engine at very good efficiencies is also presented. The combination of these techniques can result in an engine for automotive use that is half the weight of conventional units with a thermal efficiency of 40% or more at average engine output.

Abstract: A temperature control unit for independent control of a number of independent channels, as can exist with a cluster tool used for semiconductor fabrication, has high efficiency, long term life and reliability, and requires only a small floor area. To these ends, the unit employs a single high capacity refrigeration system and disposes a number of separate temperature control channels for the individual tools, with only some channels receiving refrigerant. Low temperature channels use high pressure, sub-cooled refrigerant for chilling the heat transfer fluid to selected levels controlled by proportional valves adjusting refrigerant flow through evaporator heat exchanger units which cool heat transfer fluid. Moderate temperature channels cool the heat transfer fluid for associated tools to an ambient temperature level.

Abstract: A temperature control unit for independent control of a number of independent channels, as can exist with a cluster tool used for semiconductor fabrication, has high efficiency, long term life and reliability, and requires only a small floor area. To these ends, the unit employs a single high capacity refrigeration system and disposes a number of separate temperature control channels for the individual tools, with only some channels receiving refrigerant. Low temperature channels use high pressure, sub-cooled refrigerant for chilling the heat transfer fluid to selected levels controlled by proportional valves adjusting refrigerant flow through evaporator heat exchanger units which cool heat transfer fluid. Moderate temperature channels cool the heat transfer fluid for associated tools to an ambient temperature level.

Abstract: An arrangement is provided for insuring that excessive demand is not placed on a refrigeration unit that supplies pressurized subcooled refrigerant to different channels having independent needs for use of refrigeration capacity. A separate reference channel receives a portion of the refrigerant and expands the refrigerant fully to a gas phase to establish a minimum level reference temperature. In the operative channels the refrigerant flows into individual evaporators/heat exchangers at rates set by external command signals, the refrigerant being in heat exchange relation with thermal transfer fluid in the evaporator/heat exchanger. Evaporation of refrigerant in each channel thus brings the thermal transfer fluid for that channel to the target temperature. By comparing the post evaporation temperature in each channel to the reference temperature and reducing the refrigerant flow rate whenever the difference is below a threshold, individual channels are not overtaxed and the system remains stable.