Abstract: A method and device for precisely driving a rotary object includes a motor ounted in a housing and a reduction device comprising first and second harmonic drives, which connect the motor to the object to be driven via an output shaft. The output shaft is connected to the object to be driven via an adapter cup and a bellows which is stiff in torsion but which tolerates misalignments between the drive device and the object. All elements are designed to maximize stiffness and precision and to minimize backlash while maintaining maximum concentricity between the elements.

Abstract: A tilt mechanism includes a rigid base member, a first tilt plate pivotally ounted on the base member, and a second tilt plate pivotally mounted on the first tilt plate. The first and second tilt plates are pivoted via actuating mechanisms which include stepper motors, harmonic drives, and precision nuts which translate the rotational output of the harmonic drives to pivotal motion of the tilt plates. All of the movable components of the mechanism are mounted to one another via flexural pivots which allow at least limited rotation in one direction but which prevent movement in all other directions.