Abstract: Systems and methods for processing microfeature workpieces are disclosed herein. In one embodiment, a system includes a processing vessel for receiving a plurality of microfeature workpieces, an inlet through which a processing fluid can flow into the processing vessel, and a workpiece mover for moving the microfeature workpieces in the processing vessel. The workpiece mover includes a first end portion configured to contact a peripheral edge of the individual workpieces, a second end portion opposite and positioned upstream from the first end portion, and a third portion between the first and second end portions. The first end portion has a first thickness, the second end portion has a second thickness, and the third portion has a third thickness greater than the first and second thicknesses.