Patents by Inventor Kennosuke ITAGAKI

Kennosuke ITAGAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam writing apparatus and output control method
    Patent number: 9384939
    Abstract: An output control method according to an embodiment is to control an output by a deflection amplifier that outputs a voltage signal to a deflection electrode of an electron beam writing apparatus. The voltage signal is proportional to input data, and the method includes: performing, for the voltage signal generated by synthesizing respective outputs by a plurality of D/A converters to which a control range of the voltage signal is assigned, the respective outputs by the plurality of D/A converters being proportional to respective inputs, sampling on at least either a lower limit value of the voltage signal within the control range or an upper limit value thereof; and generating a correction value to correct the output by the D/A converter based on the sampling result.
    Type: Grant
    Filed: November 10, 2015
    Date of Patent: July 5, 2016
    Assignee: NuFlare Technology, Inc.
    Inventors: Kennosuke Itagaki, Takiji Ishimura, Hiroyoshi Ando
  • ELECTRON BEAM WRITING APPARATUS AND OUTPUT CONTROL METHOD
    Publication number: 20160141143
    Abstract: An output control method according to an embodiment is to control an output by a deflection amplifier that outputs a voltage signal to a deflection electrode of an electron beam writing apparatus. The voltage signal is proportional to input data, and the method includes: performing, for the voltage signal generated by synthesizing respective outputs by a plurality of D/A converters to which a control range of the voltage signal is assigned, the respective outputs by the plurality of D/A converters being proportional to respective inputs, sampling on at least either a lower limit value of the voltage signal within the control range or an upper limit value thereof; and generating a correction value to correct the output by the D/A converter based on the sampling result.
    Type: Application
    Filed: November 10, 2015
    Publication date: May 19, 2016
    Applicant: NuFlare Technology, Inc.
    Inventors: Kennosuke ITAGAKI, Takiji ISHIMURA, Hiroyoshi ANDO