Abstract: A valve device includes a valve main body having a valve chamber, and inflow and outflow passages communicating with the valve chamber; an annular valve seat surrounding an opening from the inflow passage to the valve chamber; and a valve element moved to contact with and separate from the valve seat. One of the valve seat and the valve element includes a contact surface, and the other of the valve seat and the valve element includes an annular raised rib. The rib has at a top thereof an annular sealing part contacting the contact surface to provide sealing between the valve element and the valve seat. The sealing part includes an annular flat surface extending parallel to the contact surface, and two annular inclined surfaces provided adjacent to the flat surface on both sides and inclined to the flat surface to extend in a direction away from the contact surface.

Abstract: A diaphragm valve includes: a valve body having formed therein a first valve chamber, a second valve chamber and a communication passage communicating between the two valve chambers; a valve seat formed in the communication passage; a valve mechanism including a diaphragm supporting a valve element that comes in contact with and separates from the valve seat and a second diaphragm; a pressurizing unit being configured to pressurize the first diaphragm so as to press the valve element against the valve seat; and a bonnet for holding an outer peripheral part of the second diaphragm between the bonnet and the valve body. The pressurizing unit is configured as a single integrated unit holding therein a movable body that moves in conjunction with the valve element via a stem.

Abstract: A valve device includes a valve main body having a valve chamber, and inflow and outflow passages communicating with the valve chamber; an annular valve seat surrounding an opening from the inflow passage to the valve chamber; and a valve element moved to contact with and separate from the valve seat. One of the valve seat and the valve element includes a contact surface, and the other of the valve seat and the valve element includes an annular raised rib. The rib has at a top thereof an annular sealing part contacting the contact surface to provide sealing between the valve element and the valve seat. The sealing part includes an annular flat surface extending parallel to the contact surface, and two annular inclined surfaces provided adjacent to the flat surface on both sides and inclined to the flat surface to extend in a direction away from the contact surface.

Abstract: A diaphragm valve includes: a valve body having formed therein a first valve chamber, a second valve chamber and a communication passage communicating between the two valve chambers; a valve seat formed in the communication passage; a valve mechanism including a diaphragm supporting a valve element that comes in contact with and separates from the valve seat and a second diaphragm; a pressurizing unit being configured to pressurize the first diaphragm so as to press the valve element against the valve seat; and a bonnet for holding an outer peripheral part of the second diaphragm between the bonnet and the valve body. The pressurizing unit is configured as a single integrated unit holding therein a movable body that moves in conjunction with the valve element via a stem.

Abstract: An object of the present invention is to provide a fluid mixing system able to mix the fluids of different lines by any ratio and control the flow rates of even pulsating fluids, able to control the flow rate of even a pulsating fluid, compact in configuration and able to be installed in a narrow space, and enabling easy pipe laying and pipe connection at the time of installation.

Abstract: A fluid mixer is provided which can supply a fixed amount of fluid in each of supply lines to a mixing line all the time while maintaining a highly accurate mixing ratio even if a pressure on the downstream side of a back pressure valve of the mixing line is fluctuated and moreover can change the mixing ratio of the fluids in the supply lines with high accuracy in the state where the fluids are flowed. On the upstream side from a merging point where at least two supply lines: a first supply line and a second supply line are merged to a mixing line, diaphragm parts for adjusting the flow rates of the fluids and pressure reducing valves are arranged on the further upstream side of the diaphragm parts in series with the supply lines and a back pressure valve is arranged in the mixing line.

Abstract: A fluid control apparatus is provided, in which a tube (14) is passed through a through-hole of a holding unit (30,31), and a first and second coupling units (20,24) fitted with an insert portions at both ends of the tube are fitted on a large-diameter portion of the holding unit, and a flange of the second coupling unit (24) and the holding unit are fixed in pressure contact between a fluid control pipe member and a measuring instrument (2), and a connection unit of the second coupling unit (24) is directly connected to a fluid inlet or a fluid outlet of the measuring instrument (2).

Abstract: The fluid control system according to the present invention is characterized by being provided with a fluid control valve controlling a pressure of a fluid by a pressure operation of a control fluid, a flow rate measuring device measuring a flow rate of the fluid, converting a measurement value of said flow rate to an electrical signal, and outputting it, and a control part outputting a command signal for controlling an opening area of said fluid control valve to said fluid control valve or equipment operating said fluid control valve based on a difference of said electrical signal from said flow rate measuring device and a set flow rate.

Abstract: The fluid control system according to the present invention is characterized by being provided with a fluid control valve changing an opening area of a passage so as to control a flow rate of a fluid, a flow rate measuring device measuring a flow rate of the fluid, converting a measurement value of said flow rate to an electrical signal, and outputting it, and a control part outputting a command signal for controlling an opening area of said fluid control valve to said fluid control valve or a piece of equipment operating said fluid control valve based on a difference between the electrical signal from the flow rate measuring device and a set flow rate as a first characterizing feature.

Abstract: A valve (100) includes a body (1) having a valve seat (10) formed therein, a bonnet (2), a diaphragm (3) supporting a valve element (18) abutting against and moving away from the valve seat (10), and an elastic member such as an O-ring (5). The body (1) is formed with an annular groove (13) extending around the valve seat (10), and the diaphragm (3) is provided at the peripheral edge (20) with an annular engagement part (21) formed to have an approximate L-shape in cross-section. The annular engagement part (21) is inserted into the annular groove (13) in a tight state by the elastic member disposed between the bonnet (2) and the annular engagement part (21) of the diaphragm (3).

Abstract: A constant flow valve has a chamber (6) provided therein with a first diaphragm (8) having a valve member (7), a second diaphragm (9) and a third diaphragm (10). The chamber is divided into a first pressure chamber (11), a second valve chamber (12), a first valve chamber (13) and a second pressure chamber (18). The first pressure chamber has means for applying a constant inward force to the second diaphragm, and the second pressure chamber has means for applying a constant inward force to the third diaphragm. The first valve chamber is communicated with an inlet channel, the second valve chamber has a valve seat (27) corresponding to the valve member, and the valve seat divides the chamber into a bottom valve chamber (14) communicating with the first valve chamber through a communication hole formed in the first diaphragm and a top valve chamber (15) communicating with an outlet channel.

Abstract: A piping device includes a body, a tube accommodated in the body and defining a flow passage, coupling members each having an insert portion, at one end thereof, to be inserted into the tube in a watertight state, a connecting portion at the other end thereof, and a flange portion at the central part thereof, and holding members each formed with a through hole at the central part thereof. The through hole of the holding member includes, at one end thereof, an expanded-diameter portion having a hole diameter larger than the remaining portion of the through hole.

Abstract: A fluid control system with easy installation in a semiconductor production system etc. and pipe and wiring connections, with reduced pressure loss due to pipe connections, with easy change of arrangement of modules, free from corrosion even using a corrosive fluid for the fluid, and enabling control of the flow rate even with pulsation of the inflowing fluid is provided. The fluid control system of the present invention is characterized by having a flowmeter sensor part having an ultrasonic oscillator generating an ultrasonic wave in a fluid and an ultrasonic oscillator receiving the ultrasonic wave generated from the ultrasonic oscillator and outputting a signal to a flowmeter amplifier and a control valve controlling the state of flow of fluid to a predetermined state by a working pressure, wherein the flowmeter sensor part and the control valve are arranged inside a casing having a fluid inlet and a fluid outlet.

Abstract: An object of the present invention is to provide a fluid mixing system able to mix the fluids of different lines by any ratio and control the flow rates of even pulsating fluids, able to control the flow rate of even a pulsating fluid, compact in configuration and able to be installed in a narrow space, and enabling easy pipe laying and pipe connection at the time of installation.

Abstract: A constant flow valve has a chamber (6) provided therein with a first diaphragm (8) having a valve member (7), a second diaphragm (9) and a third diaphragm (10). The chamber is divided into a first pressure chamber (11), a second valve chamber (12), a first valve chamber (13) and a second pressure chamber (18). The first pressure chamber has means for applying a constant inward force to the second diaphragm, and the second pressure chamber has means for applying a constant inward force to the third diaphragm. The first valve chamber is communicated with an inlet channel, the second valve chamber has a valve seat (27) corresponding to the valve member, and the valve seat divides the chamber into a bottom valve chamber (14) communicating with the first valve chamber through a communication hole formed in the first diaphragm and a top valve chamber (15) communicating with an outlet channel.

Abstract: A valve (100) includes a body (1) having a valve seat (10) formed therein, a bonnet (2), a diaphragm (3) supporting a valve element (18) abutting against and moving away from the valve seat (10), and an elastic member such as an O-ring (5). The body (1) is formed with an annular groove (13) extending around the valve seat (10), and the diaphragm (3) is provided at the peripheral edge (20) with an annular engagement part (21) formed to have an approximate L-shape in cross-section. The annular engagement part (21) is inserted into the annular groove (13) in a tight state by the elastic member disposed between the bonnet (2) and the annular engagement part (21) of the diaphragm (3).

Abstract: A fluid mixer is provided which can supply a fixed amount of fluid in each of supply lines to a mixing line all the time while maintaining a highly accurate mixing ratio even if a pressure on the downstream side of a back pressure valve of the mixing line is fluctuated and moreover can change the mixing ratio of the fluids in the supply lines with high accuracy in the state where the fluids are flowed. On the upstream side from a merging point where at least two supply lines: a first supply line and a second supply line are merged to a mixing line, diaphragm parts for adjusting the flow rates of the fluids and pressure reducing valves are arranged on the further upstream side of the diaphragm parts in series with the supply lines and a back pressure valve is arranged in the mixing line.

Abstract: A flow control valve includes a main body 1, bonnet 2, spring receiving portion 3, piston 4, spring 24, first diaphragm 27, first valve member 5, second valve member 6 and base plate 7, wherein an opening area of a hydraulic control portion composed of a valve element of the second valve member and a valve seat of the main body is changed according to a motion of the piston.

Abstract: A flow control valve includes a main body 1, bonnet 2, spring receiving portion 3, piston 4, spring 24, first diaphragm 27, first valve member 5, second valve member 6 and base plate 7, wherein an opening area of a hydraulic control portion composed of a valve element of the second valve member and a valve seat of the main body is changed according to a motion of the piston.

Abstract: In a constant pressure regulator according to the present invention, a diaphragm defining an air chamber with a body is clamped between the body and a cover. An air chamber defining ring provided around the air chamber is clamped between the body and the cover. The upper surface and the lower surface of the air chamber defining ring are formed with a first recess having a seal ring fitted therein for backing the annular protrusion of the diaphragm and a second recess with a seal ring fitted therein for sealing the air chamber, respectively. The diaphragm has a central cylindrical bore portion defining a fluid control potion with the plug formed on the body. A second valve chamber is defined between the diaphragm and the cover. The body is formed with a first valve chamber and an inlet flow passage, and the second valve chamber is formed with an outlet flow passage.