Abstract: Provided is a high-accuracy embedded audiphone. A transducer (34) made of a giant magnetostrictive element is provided in an intracorporeal unit (3) that is embedded in a skull (5). An audible sound modulation transmission signal (S1), which is amplitude-modulated by a sound collection signal generated in an extracorporeal unit (2), is transmitted from an extracorporeal transmitter coil (31) to an intracorporeal receiver coil (32) provided in the intracorporeal unit (3) with the help of a transmission magnetic flux (33). Moreover, because of an induced electromotive force of the intracorporeal receiver coil (32), the transducer (34) expands and contracts. Therefore, it is possible to highly accurately conduct an audible sound signal through bone with no power source or demodulation circuit provided in the intracorporeal unit (3).

Abstract: A cassette waiting block is connected to a transfer in/out block of a coating and developing treatment system, and in the cassette waiting block, a cassette transfer in/out unit, a cassette waiting unit, a cassette delivery unit, and a substrate processing unit are provided. In the cassette waiting block, a cassette transfer unit for transferring the cassette between the cassette transfer in/out unit, the cassette waiting unit, and the cassette deliver unit, and a transfer unit for transferring the substrate between the cassette in the cassette waiting unit and the substrate processing unit are provided. Each cassette waiting unit has an opening mechanism for opening a port of the cassette.

Abstract: Provided is a high-accuracy embedded audiphone. A transducer (34) made of a giant magnetostrictive element is provided in an intracorporeal unit (3) that is embedded in a skull (5). An audible sound modulation transmission signal (S1), which is amplitude-modulated by a sound collection signal generated in an extracorporeal unit (2), is transmitted from an extracorporeal transmitter coil (31) to an intracorporeal receiver coil (32) provided in the intracorporeal unit (3) with the help of a transmission magnetic flux (33). Moreover, because of an induced electromotive force of the intracorporeal receiver coil (32), the transducer (34) expands and contracts. Therefore, it is possible to highly accurately conduct an audible sound signal through bone with no power source or demodulation circuit provided in the intracorporeal unit (3).

Abstract: In the present invention, when trouble occurs and the operation of a substrate processing apparatus is stopped, substrate information containing positions and processing states of the substrates located in the apparatus at that time is stored, and the power supply of the apparatus is then turned off. When the apparatus is restarted, the substrates located in the apparatus are collected into a substrate housing unit, and each of the substrates in the substrate housing unit is then sequentially transferred to a plurality of processing units following the same transfer recipe as that before occurrence of trouble, and substrate processing is not performed in a processing unit in which processing has already been completed, whereas substrate processing is performed in a processing unit in which processing has not been performed yet, based on the substrate information.

Abstract: A cassette waiting block is connected to a transfer in/out block of a coating and developing treatment system, and in the cassette waiting block, a cassette transfer in/out unit, a cassette waiting unit, a cassette delivery unit, and a substrate processing unit are provided. In the cassette waiting block, a cassette transfer unit for transferring the cassette between the cassette transfer in/out unit, the cassette waiting unit, and the cassette deliver unit, and a transfer unit for transferring the substrate between the cassette in the cassette waiting unit and the substrate processing unit are provided. Each cassette waiting unit has an opening mechanism for opening a port of the cassette.

Abstract: In the present invention, when trouble occurs and the operation of a substrate processing apparatus is stopped, substrate information containing positions and processing states of the substrates located in the apparatus at that time is stored, and the power supply of the apparatus is then turned off. When the apparatus is restarted, the substrates located in the apparatus are collected into a substrate housing unit, and each of the substrates in the substrate housing unit is then sequentially transferred to a plurality of processing units following the same transfer recipe as that before occurrence of trouble, and substrate processing is not performed in a processing unit in which processing has already been completed, whereas substrate processing is performed in a processing unit in which processing has not been performed yet, based on the substrate information.