Patents by Inventor Kenshiro NAGAHAMA

Kenshiro NAGAHAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical element angle adjustment device and extreme ultraviolet light generation device
    Patent number: 10627640
    Abstract: An optical element angle adjustment device includes a first hinge that is an elastic hinge configured to connect a first plate and a second plate with each other, an optical element holding part attached to at least one of the first plate and the second plate, and a first adjusting screw configured to apply force in a direction of closing the first hinge to adjust a tilt angle of at least one of the first plate and the second plate. An end in an axis direction of the first adjusting screw is provided with a first press member configured to slidably abut on one of the first plate and the second plate. At least one of a first press member side abutting portion and a first hinge side abutting portion on which the first press member abuts has a curved surface in a curved surface shape.
    Type: Grant
    Filed: December 4, 2018
    Date of Patent: April 21, 2020
    Assignee: Gigaphoton Inc.
    Inventors: Kenshiro Nagahama, Yukio Watanabe
  • OPTICAL ELEMENT ANGLE ADJUSTMENT DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
    Publication number: 20190113765
    Abstract: An optical element angle adjustment device includes a first hinge that is an elastic hinge configured to connect a first plate and a second plate with each other, an optical element holding part attached to at least one of the first plate and the second plate, and a first adjusting screw configured to apply force in a direction of closing the first hinge to adjust a tilt angle of at least one of the first plate and the second plate. An end in an axis direction of the first adjusting screw is provided with a first press member configured to slidably abut on one of the first plate and the second plate. At least one of a first press member side abutting portion and a first hinge side abutting portion on which the first press member abuts has a curved surface in a curved surface shape.
    Type: Application
    Filed: December 4, 2018
    Publication date: April 18, 2019
    Applicant: GIGAPHOTON INC.
    Inventors: Kenshiro NAGAHAMA, Yukio WATANABE