Patents by Inventor Kensuke HABA

Kensuke HABA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20180102247
    Abstract: A substrate processing apparatus includes a substrate support having a central first upper surface and a second upper surface surrounding the first upper surface and formed higher than the first upper surface, and an exhaust duct surrounding the substrate support, wherein a first through hole and a second through hole are formed in the substrate support, the first through hole being formed through the substrate support from the first upper surface, the second through hole connecting the first through hole and a side surface of the substrate support.
    Type: Application
    Filed: October 6, 2016
    Publication date: April 12, 2018
    Applicant: ASM IP Holding B.V.
    Inventors: Richika KATO, Kensuke HABA