Abstract: Provided are a detection circuit and an image generation device capable of accurately generating a detection signal corresponding to a change in a scanning speed. Mirror detection circuit (detection circuit) inputs a voltage generated in a monitoring piezoelectric element for monitoring an operation state of a second scanning part (light deflecting element) to a gate of field effect transistor constituting a source follower circuit, and generates a detection signal corresponding to expansion or contraction of the piezoelectric element from a source voltage of field effect transistor.

Abstract: A vibration module and an optical deflector can suppress a change in deflection angle of a movable part due to a change in static displacement of a piezoelectric body associated with a temperature change. The vibration module includes a drive element and a substrate supporting the drive element. The drive element includes a movable part, a drive unit that includes a piezoelectric body as a drive source and rotates the movable part about a rotation axis, and a fixing part that supports the movable part and the drive unit and is bonded to the substrate. The fixing part is bonded to the substrate at a plurality of portions discrete from each other with an adhesive whose elastic modulus decreases as a temperature rises, and the plurality of portions include a portion corresponding to an antinode of vibration generated in the fixing part when the movable part is resonantly driven.

Abstract: In a drive element, suppressing breakage in a support part due to stress concentration caused by torsion of the support part. The drive element includes a movable part allowed to be turned about a turn axis, a fixture, support part extending along the turn axis and connecting the movable part and the fixture, and a drive part that turns the movable part about the turn axis. A plurality of recesses extending in a direction away from the movable part is formed in side surface of the support part side by side in a thickness direction of the support part. The recess formed in a first region including at least the center in a thickness direction of the side surface of the support part has a smaller size than the recess formed in a second region other than the first region on the side surface of the support part.

Abstract: A tuning-fork-type driving element includes: a movable part rotatable about a rotation axis; a coupling part extending from the movable part along the rotation axis; a pair of arm parts placed with the coupling part located therebetween; a support part coupling the coupling part and the pair of arm parts to a fixation part; and drive parts placed on the arm parts, respectively. The pair of arm parts each have a protrusion that overlaps a node line that occurs when the arm parts vibrate in a higher-order vibration mode higher than a first-order vibration mode or an extension line of the node line.

Abstract: An optical reflection element includes: a fixation part; and a movable part supported by the fixation part so as to be rotatable about a rotation axis, having a reflection surface on a center portion of an upper surface thereof, and having a rib portion on an outer peripheral region of a lower surface thereof. The center portion of the movable part has a structure in which a base layer and an oxide film are removed from an SOI wafer in which the base layer, the oxide film, and an active layer are stacked, and the rib portion has a structure in which at least a part of the active layer is removed from the SOI wafer.

Abstract: A drive element includes: a movable part; a first support part extending along a rotation axis of the movable part and connected at one end thereof to the movable part; a pair of arm parts placed with the rotation axis located therebetween; a pair of coupling parts coupling the pair of arm parts to another end of the first support part; a second support part extending along the rotation axis and supporting the pair of coupling parts; a fixation part to which the second support part is connected; and drive parts configured to drive the arm parts, respectively. The second support part has higher rigidity than the first support part, and the pair of coupling parts are placed so as to be inclined toward the movable part side. An angle between each coupling part and the second support part is greater than 90° and equal to or less than 135°.

Abstract: An optical reflective element includes: a movable part having a mirror formed therein; a fixation part supporting the movable part; a meander-type vibration plate placed between the movable part and the fixation part; a coupling beam coupling the vibration plate to the movable part; a drive part placed on the vibration plate and configured to rotate the movable part about a rotation axis; and a stopper placed adjacent to at least one of the vibration plate and the coupling beam in a direction parallel to the rotation axis and configured to restrict at least displacement of the vibration plate.

Abstract: An optical reflective device includes: a movable part configured to be rotated about a rotation axis; a reflection surface located on the movable part; a frame part connected to the movable part at two positions symmetrical about the rotation axis; torsion part extending along the rotation axis; a connection part connecting one end of the torsion part to the frame part; a drive part connected to another end of the torsion part and configured to rotate the torsion part about the rotation axis; and a fixation part supporting the drive part, the connection part has higher rigidity than the torsion part, at least one pair of joint surfaces are formed at a boundary between the torsion part and the connection part, and the one pair of joint surfaces are symmetrical about the rotation axis and each have an acute angle on the torsion part side with the rotation axis.

Abstract: A drive element includes: a pair of drive parts placed so as to be aligned in one direction; a movable part placed between the pair of drive parts; a pair of support parts placed such that the pair of drive parts and the movable part are interposed therebetween; a pair of connection parts connecting the pair of support parts to the movable part; and a fixing part connected to at least each of the pair of drive parts in an alignment direction of the drive parts. A resonance frequency of a drive body composed of the pair of drive parts and the pair of support parts and a resonance frequency of a movable body composed of the movable part and the pair of connection parts are substantially equal to each other.

Abstract: A drive element includes: a pair of drive parts placed so as to be aligned in one direction; a movable part placed between the pair of drive parts; a pair of support parts placed such that the pair of drive parts and the movable part are interposed therebetween; a pair of connection parts connecting the pair of support parts to the movable part; and a fixing part connected to at least each of the pair of drive parts in an alignment direction of the pair of drive parts. Both end portions of the pair of support parts are connected to the pair of drive parts, respectively, and gaps each having a predetermined length are provided between the pair of support parts and the pair of drive parts so as to extend in the alignment direction of the pair of drive parts.

Abstract: A drive element includes: a movable part; a drive part configured to rotate the movable part about a rotation axis; and a connection part connecting the drive part to a fixing part. The movable part, the drive part, and the fixing part are aligned along the rotation axis. The connection part is connected to the fixing part via at least one pair of joint surfaces that are not orthogonal to the rotation axis and that are symmetrical with respect to the rotation axis.

Abstract: A piezoelectric drive element includes: a movable part; a pair of piezoelectric drive parts each connected at one end portion thereof to the movable part and configured to rotate the movable part about at least a rotation axis; and a fixing part to which end portions of the piezoelectric drive parts are connected. The pair of piezoelectric drive parts are aligned in a direction along the rotation axis with the movable part located therebetween, a width of the movable part is narrower than a width of each of the pair of piezoelectric drive parts in a plan view, and the fixing part is placed in a gap region that is outside the movable part and that is located between the pair of piezoelectric drive parts in a plan view.

Abstract: A piezoelectric driving element includes: a support; a plate-shaped movable part on which a rib is disposed; a pair of meander-type piezoelectric actuators each supported at one end thereof by the support; and a coupling part coupling another end of each of the pair of piezoelectric actuators and the movable part and having higher rigidity than the movable part.

Abstract: An actuator that includes: a first driving body that includes a first piezoelectric material that extends in a first axis direction; a second driving body that includes a second piezoelectric material shorter than the first piezoelectric material in the first axis direction; and a base that holds the first driving body and the second driving body at proximal end portions of the first driving body and the second driving body in the first axis direction. The first driving body and the second driving body are aligned and coupled together in a polarization axis direction in a state in which a polarization axis of the first piezoelectric material and a polarization axis of the second piezoelectric material correspond with each other. A length of the second piezoelectric material in a second axis direction is greater than a length of the first piezoelectric material in the second axis direction.

Abstract: An optical reflector element includes: a first oscillator and a second oscillator for oscillating a reflector and disposed with the reflector being interposed therebetween along a first axis; and a third oscillator for oscillating the first oscillator and the second oscillator. The third oscillator includes: a first assister that causes the support of the first oscillator and the support of the second oscillator to operate, by connecting the support of the first oscillator and the support of the second oscillator to one base included in a pair of bases disposed with the first axis being interposed therebetween; and a second assister that causes the support of the first oscillator and the support of the second oscillator to operate, by connecting the support of the first oscillator and the support of the second oscillator to an other base included in the pair of bases.

Abstract: A light control system includes an optical reflector element and a control device. The optical reflector element includes a reflector, and a first oscillator and a second oscillator that are disposed with the reflector being interposed therebetween. When the control device is to oscillate a first oscillator and a second oscillator to cause the first and second oscillators to rotate in the same direction around a first axis, the control device: oscillates a first driver and a second driver of the first oscillator to cause each of the first and second drivers to have a first portion and a second portion that oscillate in opposite directions in the thickness direction; and oscillates a first driver and a second driver of the second oscillator to cause each of the first and second drivers to have a third portion and a fourth portion that oscillate in opposite directions in the thickness direction.

Abstract: An optical reflector element includes: a pair of vibrator groups each of which includes tuning fork vibrators that are coupled together such that vibration centers of the tuning fork vibrators align on an imaginary rotational axis; a reflective body interposed between the pair of vibrator groups; a pair of supports that couple the pair of vibrator groups and the reflective body together; and a base to which the pair of vibrator groups are coupled in a manner that allows the pair of vibrator groups to vibrate.

Abstract: A piezoelectric functional film includes a base layer and a piezoelectric layer. The piezoelectric layer contains niobium-doped lead zirconate titanate. The base layer contains one of niobium-doped lead titanate, (niobium, lanthanum)-doped lead titanate, and (niobium, lanthanum, magnesium)-doped lead titanate.

Abstract: A piezoelectric element includes a lower electrode, an upper electrode, and a piezoelectric layer disposed between the lower and upper electrodes. The piezoelectric layer contains (niobium, manganese)-doped lead zirconate titanate. In the (niobium, manganese)-doped lead zirconate titanate, a ratio of the number of moles of niobium to a total of the number of moles of niobium, manganese, zirconium, and titanium is not less than 10% and is not more than 25%. The ratio of the number of moles of manganese to the total of the number of moles of niobium, manganese, zirconium, and titanium is not less than 0.3% and is not more than 1.2%. This piezoelectric element decreases an internal electric field therein.

Abstract: A piezoelectric element includes a lower electrode, an upper electrode, and a piezoelectric layer disposed between the lower and upper electrodes. The piezoelectric layer contains (niobium, manganese)-doped lead zirconate titanate. In the (niobium, manganese)-doped lead zirconate titanate, a ratio of the number of moles of niobium to a total of the number of moles of niobium, manganese, zirconium, and titanium is not less than 10% and is not more than 25%. The ratio of the number of moles of manganese to the total of the number of moles of niobium, manganese, zirconium, and titanium is not less than 0.3% and is not more than 1.2%. This piezoelectric element decreases an internal electric field therein.