Abstract: The present disclosure relates to a mask repair apparatus capable of efficiently repairing a defect of a target EUVL mask. The mask repair apparatus repairs the defect of the target extreme ultra violet lithography (EUVL) mask having a reflective layer, a first layer disposed on the reflective layer, and a second layer disposed on the first layer, and a third layer disposed on the second layer. The mask repair apparatus performs etching of the third layer by a first etching method, and after the etching of the third layer by the first etching method, performs etching of the second layer by the second etching method different from the first etching method.

Abstract: A method of acquiring an image of an image acquiring region of a sample comprises a first step of irradiating and scanning an ion beam in a first scan pattern on a first scan region of a sample, the scan region including therein the image acquiring region, and a second step of detecting secondary charged particles generated by irradiating and scanning the ion beam on the first scan region of the sample and generating first image data of the image acquiring region. The first and second steps are repeated a plurality of times using different scan patterns on different scan regions that differ from the first scan and the first scan region and from one another, each of the different scan regions including therein the image acquiring region, to generate a plurality of image data of the image acquiring region.

Abstract: Disclosed herein is a method for acquiring an image, in which an image reducing the influence of electrification of a substrate is easily acquired. The method, in which an image of an image acquiring region is acquired by radiating an ion beam to a sample having a conducting part with a linear edge on a dielectric substrate, includes: performing an equal-width scan caused by the ion beam in a first direction that obliquely intersects the edge and sweep in a second direction intersecting the first direction, and radiating the ion beam to a scan region of a parallelogram shape wider than the image acquiring region; detecting secondary charged particles to generate image data of the scan region; calculating the image data of the scan region to generate image data of the image acquiring region; and displaying the image data of the image acquiring region.

Abstract: A method for acquiring an image, in which an image of an image acquiring region is acquired by radiating an ion beam to a sample having a conducting part with a linear edge on a dielectric substrate, includes performing an equal-width scan of the ion beam in a first direction that obliquely intersects the linear edge and sweep in a second direction intersecting the first direction. The ion beam is sequentially scanned in different patterns on different scan regions of parallelogram shape, each of which includes the image acquiring region. Secondary charged particles are detected to generate image data of all the scan regions, and image data of the scan regions are calculated to generate image data of the image acquiring region. The image data of the image acquiring region are synthesized to display the image data of the image acquiring region.

Abstract: Disclosed herein is a method for acquiring an image, in which an image reducing the influence of electrification of a substrate is easily acquired. The method, in which an image of an image acquiring region is acquired by radiating an ion beam to a sample having a conducting part with a linear edge on a dielectric substrate, includes: performing an equal-width scan caused by the ion beam in a first direction that obliquely intersects the edge and sweep in a second direction intersecting the first direction, and radiating the ion beam to a scan region of a parallelogram shape wider than the image acquiring region; detecting secondary charged particles to generate image data of the scan region; calculating the image data of the scan region to generate image data of the image acquiring region; and displaying the image data of the image acquiring region.

Abstract: A door opening and closing device includes, a door supporting portion for supporting an axial side of a door, a door receiving portion inclined to the door supporting portion for receiving an open-send side of the door, an opening formed from the door supporting portion to the door receiving portion to be opened and closed by the door, a first support point made by a combination of a shaft attached to the axial side of the door and an elongated hole formed on the door supporting portion, and a second support point provided at an intermediate portion between the axial side and the open-end side of the door and capable of freely contacting-with and separated-from the door receiving portion. The open-end side is angled to the axial side to have an angle therebetween in accordance with an inclined angle of the door receiving portion to the door supporting portion.

Abstract: A door opening and closing device includes, a door supporting portion for supporting an axial side of a door, a door receiving portion inclined to the door supporting portion for receiving an open-send side of the door, an opening formed from the door supporting portion to the door receiving portion to be opened and closed by the door, a first support point made by a combination of a shaft attached to the axial side of the door and an elongated hole formed on the door supporting portion, and a second support point provided at an intermediate portion between the axial side and the open-end side of the door and capable of freely contacting-with and separated-from the door receiving portion. The open-end side is angled to the axial side to have an angle therebetween in accordance with an inclined angle of the door receiving portion to the door supporting portion.

Abstract: A fuel cell includes: a membrane electrode assembly provided with an electrolyte membrane and gas diffusion electrodes attached to both sides of the electrolyte membrane; separators supporting the membrane electrode assembly from both sides thereof; a gas flow path forming member disposed between the separator and the gas diffusion electrode to form gas flow path for supplying reactant gas for power generation in the fuel cell to the gas diffusion electrode; and an elastic member disposed between the separator and the gas flow path forming member and having an elastic modulus which is lower than that of the gas flow path forming member.