Patents by Inventor Kensuke Shiina
Kensuke Shiina has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240343520Abstract: According to an aspect, a medium loading device includes a loading table on which a medium is loaded, a fence in contact with an end of the medium loaded on the loading table, and a processor configured to vibrate the fence when leaning of the medium against the fence is detected.Type: ApplicationFiled: April 4, 2024Publication date: October 17, 2024Applicant: RISO KAGAKU CORPORATIONInventor: Kensuke SHIINA
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Publication number: 20200310245Abstract: The present disclosure relates to a mask repair apparatus capable of efficiently repairing a defect of a target EUVL mask. The mask repair apparatus repairs the defect of the target extreme ultra violet lithography (EUVL) mask having a reflective layer, a first layer disposed on the reflective layer, and a second layer disposed on the first layer, and a third layer disposed on the second layer. The mask repair apparatus performs etching of the third layer by a first etching method, and after the etching of the third layer by the first etching method, performs etching of the second layer by the second etching method different from the first etching method.Type: ApplicationFiled: March 12, 2020Publication date: October 1, 2020Inventors: Tomokazu KOZAKAI, Fumio ARAMAKI, Osamu MATSUDA, Kensuke SHIINA
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Patent number: 10276343Abstract: A method of acquiring an image of an image acquiring region of a sample comprises a first step of irradiating and scanning an ion beam in a first scan pattern on a first scan region of a sample, the scan region including therein the image acquiring region, and a second step of detecting secondary charged particles generated by irradiating and scanning the ion beam on the first scan region of the sample and generating first image data of the image acquiring region. The first and second steps are repeated a plurality of times using different scan patterns on different scan regions that differ from the first scan and the first scan region and from one another, each of the different scan regions including therein the image acquiring region, to generate a plurality of image data of the image acquiring region.Type: GrantFiled: May 17, 2018Date of Patent: April 30, 2019Inventors: Tomokazu Kozakai, Fumio Aramaki, Osamu Matsuda, Kensuke Shiina, Kazuo Aita, Anto Yasaka
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Publication number: 20180269029Abstract: Disclosed herein is a method for acquiring an image, in which an image reducing the influence of electrification of a substrate is easily acquired. The method, in which an image of an image acquiring region is acquired by radiating an ion beam to a sample having a conducting part with a linear edge on a dielectric substrate, includes: performing an equal-width scan caused by the ion beam in a first direction that obliquely intersects the edge and sweep in a second direction intersecting the first direction, and radiating the ion beam to a scan region of a parallelogram shape wider than the image acquiring region; detecting secondary charged particles to generate image data of the scan region; calculating the image data of the scan region to generate image data of the image acquiring region; and displaying the image data of the image acquiring region.Type: ApplicationFiled: May 17, 2018Publication date: September 20, 2018Inventors: Tomokazu KOZAKAI, Fumio ARAMAKI, Osamu MATSUDA, Kensuke SHIINA, Kazuo AITA, Anto YASAKA
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Patent number: 10014157Abstract: A method for acquiring an image, in which an image of an image acquiring region is acquired by radiating an ion beam to a sample having a conducting part with a linear edge on a dielectric substrate, includes performing an equal-width scan of the ion beam in a first direction that obliquely intersects the linear edge and sweep in a second direction intersecting the first direction. The ion beam is sequentially scanned in different patterns on different scan regions of parallelogram shape, each of which includes the image acquiring region. Secondary charged particles are detected to generate image data of all the scan regions, and image data of the scan regions are calculated to generate image data of the image acquiring region. The image data of the image acquiring region are synthesized to display the image data of the image acquiring region.Type: GrantFiled: September 28, 2016Date of Patent: July 3, 2018Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Tomokazu Kozakai, Fumio Aramaki, Osamu Matsuda, Kensuke Shiina, Kazuo Aita, Anto Yasaka
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Publication number: 20170092461Abstract: Disclosed herein is a method for acquiring an image, in which an image reducing the influence of electrification of a substrate is easily acquired. The method, in which an image of an image acquiring region is acquired by radiating an ion beam to a sample having a conducting part with a linear edge on a dielectric substrate, includes: performing an equal-width scan caused by the ion beam in a first direction that obliquely intersects the edge and sweep in a second direction intersecting the first direction, and radiating the ion beam to a scan region of a parallelogram shape wider than the image acquiring region; detecting secondary charged particles to generate image data of the scan region; calculating the image data of the scan region to generate image data of the image acquiring region; and displaying the image data of the image acquiring region.Type: ApplicationFiled: September 28, 2016Publication date: March 30, 2017Inventors: Tomokazu KOZAKAI, Fumio ARAMAKI, Osamu MATSUDA, Kensuke SHIINA, Kazuo AITA, Anto YASAKA
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Patent number: 9475320Abstract: A door opening and closing device includes, a door supporting portion for supporting an axial side of a door, a door receiving portion inclined to the door supporting portion for receiving an open-send side of the door, an opening formed from the door supporting portion to the door receiving portion to be opened and closed by the door, a first support point made by a combination of a shaft attached to the axial side of the door and an elongated hole formed on the door supporting portion, and a second support point provided at an intermediate portion between the axial side and the open-end side of the door and capable of freely contacting-with and separated-from the door receiving portion. The open-end side is angled to the axial side to have an angle therebetween in accordance with an inclined angle of the door receiving portion to the door supporting portion.Type: GrantFiled: July 27, 2015Date of Patent: October 25, 2016Assignee: RISO KAGAKU CORPORATIONInventor: Kensuke Shiina
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Publication number: 20160024836Abstract: A door opening and closing device includes, a door supporting portion for supporting an axial side of a door, a door receiving portion inclined to the door supporting portion for receiving an open-send side of the door, an opening formed from the door supporting portion to the door receiving portion to be opened and closed by the door, a first support point made by a combination of a shaft attached to the axial side of the door and an elongated hole formed on the door supporting portion, and a second support point provided at an intermediate portion between the axial side and the open-end side of the door and capable of freely contacting-with and separated-from the door receiving portion. The open-end side is angled to the axial side to have an angle therebetween in accordance with an inclined angle of the door receiving portion to the door supporting portion.Type: ApplicationFiled: July 27, 2015Publication date: January 28, 2016Inventor: Kensuke SHIINA
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Publication number: 20150171451Abstract: A fuel cell includes: a membrane electrode assembly provided with an electrolyte membrane and gas diffusion electrodes attached to both sides of the electrolyte membrane; separators supporting the membrane electrode assembly from both sides thereof; a gas flow path forming member disposed between the separator and the gas diffusion electrode to form gas flow path for supplying reactant gas for power generation in the fuel cell to the gas diffusion electrode; and an elastic member disposed between the separator and the gas flow path forming member and having an elastic modulus which is lower than that of the gas flow path forming member.Type: ApplicationFiled: March 2, 2015Publication date: June 18, 2015Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Kenji Tsubosaka, Hiroo Yoshikawa, Kenji Sato, Kensuke Shiina