Patents by Inventor Kent Way

Kent Way has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Early detection of contact liner integrity by chemical reaction
    Patent number: 7078247
    Abstract: The integrity of a liner in an interconnect structure or other layer in an integrate circuit is tested in a short time by exposing the liner to a reactive gas that attacks the underlying silicon or other material behind the liner. A weak spot in the liner permits the gas to react with the silicon, which produces a visible area that can be readily identified. The test can be performed in a few hours, in contrast to a period of several months required to complete the process, package the circuit and conduct a burn-in test.
    Type: Grant
    Filed: June 6, 2003
    Date of Patent: July 18, 2006
    Assignee: International Business Machines Corporation
    Inventors: Lawrence Bauer, Jr., Kenneth Giewont, Subramanian Iyer, Bosang Kim, Jeffrey Lloyd, Peter Locke, James Norum, Paul Parries, Kent Way, Kwong Hon Wong
  • EARLY DETECTION OF CONTACT LINER INTEGRITY BY CHEMICAL REACTION
    Publication number: 20050010455
    Abstract: The integrity of a liner in an interconnect structure or other layer in an integrate circuit is tested in a short time by exposing the liner to a reactive gas that attacks the underlying silicon or other material behind the liner. A weak spot in the liner permits the gas to react with the silicon, which produces a visible area that can be readily identified. The test can be performed in a few hours, in contrast to a period of several months required to complete the process, package the circuit and conduct a burn-in test.
    Type: Application
    Filed: June 6, 2003
    Publication date: January 13, 2005
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Lawrence Bauer, Kenneth Giewont, Subramanian Iyer, Bosang Kim, Jeffrey Lloyd, Peter Locke, James Norum, Paul Parries, Kent Way, Kwong Wong