Patents by Inventor Kenta Horigome

Kenta Horigome has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitoring apparatus of raw material tank and monitoring method of raw material tank
    Patent number: 11073851
    Abstract: A monitoring apparatus for monitoring a raw material tank monitors the temperature of the raw material tank when the temperature of the raw material tank storing a solid or liquid raw material is raised to a set temperature by a heating unit. The monitoring apparatus includes: a temperature determination unit configured to determine whether the temperature has reached a stable range including the set temperature, and determine whether the temperature has deviated from the stable range; and a setting unit configured to set the set temperature of the heating unit to 0° C. when a predetermined timeout time has elapsed from a time point at which the temperature determination unit determined that the temperature deviated from the stable range.
    Type: Grant
    Filed: November 26, 2019
    Date of Patent: July 27, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kenta Horigome, Shinobu Kawamorita, Yosuke Matsumoto, Kosuke Takahashi, Naohide Ito
  • MONITORING APPARATUS OF RAW MATERIAL TANK AND MONITORING METHOD OF RAW MATERIAL TANK
    Publication number: 20200165720
    Abstract: A monitoring apparatus for monitoring a raw material tank monitors the temperature of the raw material tank when the temperature of the raw material tank storing a solid or liquid raw material is raised to a set temperature by a heating unit. The monitoring apparatus includes: a temperature determination unit configured to determine whether the temperature has reached a stable range including the set temperature, and determine whether the temperature has deviated from the stable range; and a setting unit configured to set the set temperature of the heating unit to 0° C. when a predetermined timeout time has elapsed from a time point at which the temperature determination unit determined that the temperature deviated from the stable range.
    Type: Application
    Filed: November 26, 2019
    Publication date: May 28, 2020
    Inventors: Kenta Horigome, Shinobu Kawamorita, Yosuke Matsumoto, Kosuke Takahashi, Naohide Ito