Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: In a method for adjusting a fluid control apparatus, in a pressing step, a piezoelectric pump is placed on a stage with a cover plate facing upward, the stage is moved up, and a center portion of a principal surface of the cover plate on a side opposite to a diaphragm is pressed with a pressing pin. As a result, the cover plate and the base plate are shaped so as to warp convexly toward the diaphragm side, and a portion joined to a flexible plate is pulled, such that the flexible plate is caused to warp convexly toward the diaphragm side. Thus, residual tensile stress occurs in a movable portion of the flexible plate. Therefore, due to the residual tensile stress, the tensile stress of the movable portion of the flexible plate is increased.

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate including a first main surface and a second main surface, and a frame plate surrounding the surroundings of the vibrating plate. The driver is provided on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate has a hole formed thereon. Furthermore, the flexible plate faces the second main surface of the vibrating plate, and adheres to the frame plate by the adhesive agent that contains a plurality of particles arranged such that the plurality of particles are interposed between the flexible plate and the vibrating plate.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.

Abstract: A fluid control device includes a vibrating plate including a first main surface and a second main surface, a driver that is provided on the first main surface of the vibrating plate and vibrates the vibrating plate, and a plate that is provided on the second main surface of the vibrating plate and has a hole provided thereon. At least one of either the vibrating plate or the plate is positioned between the hole and a region of the vibrating plate facing the hole, and includes a projection projecting in a direction intermediate between the hole and the region of the vibrating plate facing the hole.

Abstract: A fluid control device includes a vibrating plate unit, a driver, a flexible plate, and a base plate. The vibrating plate unit includes a vibrating plate including first and second main surfaces, and a frame plate surrounding the surrounding of the vibrating plate. The driver is bonded to the first or the second main surface of the vibrating plate and vibrates the vibrating plate. The flexible plate includes a hole provided therein, and is bonded to the frame plate so as to face the vibrating plate. The base plate is bonded to the main surface of the flexible plate on a side opposite to the vibrating plate. A size relationship between the coefficients of linear expansion of the material of the base plate and the frame plate is equal to a size relationship between the coefficients of linear expansion of the material of the vibrating plate and the driver.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.

Abstract: A small-sized, low-profile fluid pump having high pumping capabilities includes an actuator and a planar section including a metal plate. The actuator includes a disk-shaped piezoelectric element attached to a disk-shaped diaphragm. As a result of application of a square-wave or sine-wave drive voltage, the actuator performs a bending vibration from the central portion to the peripheral portion. The peripheral portion of the actuator is not restrained. The actuator performs a bending vibration in the state in which it is in proximity to the planar section while facing the planar section. A center vent is provided at or in an area adjacent to the center of an actuator facing area of the planar section that faces the actuator.

Abstract: In a method for adjusting a fluid control apparatus, in a pressing step, a piezoelectric pump is placed on a stage with a cover plate facing upward, the stage is moved up, and a center portion of a principal surface of the cover plate on a side opposite to a diaphragm is pressed with a pressing pin. As a result, the cover plate and the base plate are shaped so as to warp convexly toward the diaphragm side, and a portion joined to a flexible plate is pulled, such that the flexible plate is caused to warp convexly toward the diaphragm side. Thus, residual tensile stress occurs in a movable portion of the flexible plate. Therefore, due to the residual tensile stress, the tensile stress of the movable portion of the flexible plate is increased.

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate including a first main surface and a second main surface, and a frame plate surrounding the surroundings of the vibrating plate. The driver is provided on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate has a hole formed thereon. Furthermore, the flexible plate faces the second main surface of the vibrating plate, and adheres to the frame plate by the adhesive agent that contains a plurality of particles arranged such that the plurality of particles are interposed between the flexible plate and the vibrating plate.

Abstract: A fluid control device includes a vibrating plate including a first main surface and a second main surface, a driver that is provided on the first main surface of the vibrating plate and vibrates the vibrating plate, and a plate that is provided on the second main surface of the vibrating plate and has a hole provided thereon. At least one of either the vibrating plate or the plate is positioned between the hole and a region of the vibrating plate facing the hole, and includes a projection projecting in a direction intermediate between the hole and the region of the vibrating plate facing the hole.

Abstract: A fluid control device includes a vibrating plate unit, a driver, a flexible plate, and a base plate. The vibrating plate unit includes a vibrating plate including first and second main surfaces, and a frame plate surrounding the surrounding of the vibrating plate. The driver is bonded to the first or the second main surface of the vibrating plate and vibrates the vibrating plate. The flexible plate includes a hole provided therein, and is bonded to the frame plate so as to face the vibrating plate. The base plate is bonded to the main surface of the flexible plate on a side opposite to the vibrating plate. A size relationship between the coefficients of linear expansion of the material of the base plate and the frame plate is equal to a size relationship between the coefficients of linear expansion of the material of the vibrating plate and the driver.

Abstract: A small-sized, low-profile fluid pump having high pumping capabilities includes an actuator and a planar section including a metal plate. The actuator includes a disk-shaped piezoelectric element attached to a disk-shaped diaphragm. As a result of application of a square-wave or sine-wave drive voltage, the actuator performs a bending vibration from the central portion to the peripheral portion. The peripheral portion of the actuator is not restrained. The actuator performs a bending vibration in the state in which it is in proximity to the planar section while facing the planar section. A center vent is provided at or in an area adjacent to the center of an actuator facing area of the planar section that faces the actuator.