Patents by Inventor Kentaro Joma

Kentaro Joma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for scheduling the movement of wafers in a wafer-processing tool
    Patent number: 6711454
    Abstract: In a system and method for scheduling the movement of wafers in a wafer-processing tool, the wafer-processing tool can include a load module, a wafer-transfer unit, a process module, and a scheduler. The scheduler can be configured to generate a schedule for the movement of wafers in the wafer-processing tool based on the duration of the operations to be performed by the wafer-transfer unit and the process module in processing the wafers.
    Type: Grant
    Filed: February 11, 2003
    Date of Patent: March 23, 2004
    Assignee: Tokyo Electron, Ltd.
    Inventors: Kentaro Joma, Tatsuya Ogi
  • System and method for scheduling the movement of wafers in a wafer-processing tool
    Publication number: 20030120371
    Abstract: In a system and method for scheduling the movement of wafers in a wafer-processing tool, the wafer-processing tool can include a load module, a wafer-transfer unit, a process module, and a scheduler. The scheduler can be configured to generate a schedule for the movement of wafers in the wafer-processing tool based on the duration of the operations to be performed by the wafer-transfer unit and the process module in processing the wafers.
    Type: Application
    Filed: February 11, 2003
    Publication date: June 26, 2003
    Inventors: Kentaro Joma, Tatsuya Ogi
  • System and method for scheduling the movement of wafers in a wafer-processing tool
    Patent number: 6535784
    Abstract: In a system and method for scheduling the movement of wafers in a wafer-processing tool, the wafer-processing tool can include a load module, a wafer-transfer unit, a process module, and a scheduler. The scheduler can be configured to generate a schedule for the movement of wafers in the wafer-processing tool based on the duration of the operations to be performed by the wafer-transfer unit and the process module in processing the wafers.
    Type: Grant
    Filed: April 26, 2001
    Date of Patent: March 18, 2003
    Assignee: Tokyo Electron, Ltd.
    Inventors: Kentaro Joma, Tatsuya Ogi
  • System and method for scheduling the movement of wafers in a wafer-processing tool
    Publication number: 20020160621
    Abstract: In a system and method for scheduling the movement of wafers in a wafer-processing tool, the wafer-processing tool can include a load module, a wafer-transfer unit, a process module, and a scheduler. The scheduler can be configured to generate a schedule for the movement of wafers in the wafer-processing tool based on the duration of the operations to be performed by the wafer-transfer unit and the process module in processing the wafers.
    Type: Application
    Filed: April 26, 2001
    Publication date: October 31, 2002
    Inventors: Kentaro Joma, Tatsuya Ogi