Patents by Inventor Kentaro Kawanami

Kentaro Kawanami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus, exposure method, and device manufacturing method
    Patent number: 9910371
    Abstract: An exposure apparatus obtains information on a relationship between a moving amount of a substrate stage in the first direction and an amount of a positional shift in an image of a mask-side reference mark projected on a substrate-side reference mark by a projection optical system in the second direction perpendicular to an optical axis of the projection optical system with respect to the substrate-side reference mark. A controller determines a focus position based on the measurement result by causing the measurement device to measure the light amount while, together with driving the substrate stage in the first direction and the second direction based on the information.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: March 6, 2018
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Kentaro Kawanami
  • EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
    Publication number: 20170017167
    Abstract: An exposure apparatus obtains information on a relationship between a moving amount of a substrate stage in the first direction and an amount of a positional shift in an image of a mask-side reference mark projected on a substrate-side reference mark by a projection optical system in the second direction perpendicular to an optical axis of the projection optical system with respect to the substrate-side reference mark. A controller determines a focus position based on the measurement result by causing the measurement device to measure the light amount while, together with driving the substrate stage in the first direction and the second direction based on the information.
    Type: Application
    Filed: July 13, 2016
    Publication date: January 19, 2017
    Inventor: Kentaro Kawanami