Patents by Inventor Kentaro SETO

Kentaro SETO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck and processing apparatus
    Patent number: 11955360
    Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.
    Type: Grant
    Filed: December 24, 2020
    Date of Patent: April 9, 2024
    Assignees: TOCALO CO., Ltd., HITACHI HIGH-TECH CORPORATION
    Inventors: Takeshi Takabatake, Tomohiro Nakasuji, Akira Itoh, Kentaro Seto, Yutaka Omoto, Hiroho Kitada, Kazuumi Tanaka
  • ELECTROSTATIC CHUCK AND PROCESSING APPARATUS
    Publication number: 20230154780
    Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.
    Type: Application
    Filed: December 24, 2020
    Publication date: May 18, 2023
    Applicants: TOCALO Co., Ltd., HITACHI HIGH-TECH CORPORATION
    Inventors: Takeshi TAKABATAKE, Tomohiro NAKASUJI, Akira ITOH, Kentaro SETO, Yutaka OMOTO, Hiroho KITADA, Kazuumi TANAKA