Abstract: The provided is a substrate transfer system that can prevent the mirror-like main surface of the substrate from coming into contact with the system components during transfer and causing scratches on the main surface. The substrate transfer system has a system component; a transfer section that moves a substrate relative to the system component; an imaging section that captures a mirror image of the system component reflected on a mirror-like main surface of the substrate and a real image of the system component, when the substrate is moved by the transfer section; and a judgment section that performs an abnormality judgment to determine whether any abnormality exists in clearance between the main surface of the substrate and the system component, based on the mirror image and the real image captured by the imaging section.

Abstract: The provided is a substrate transfer system that can prevent the mirror-like main surface of the substrate from coming into contact with the system components during transfer and causing scratches on the main surface. The substrate transfer system has a system component; a transfer section that moves a substrate relative to the system component; an imaging section that captures a mirror image of the system component reflected on a mirror-like main surface of the substrate and a real image of the system component, when the substrate is moved by the transfer section; and a judgment section that performs an abnormality judgment to determine whether any abnormality exists in clearance between the main surface of the substrate and the system component, based on the mirror image and the real image captured by the imaging section.

Abstract: The system has: a transport section that transports a substrate so that the substrate reaches A position, B position, C position, the B position, and the A position in this order, a A sensor that detects presence of the substrate that has reached the A position, a B sensor that detects presence of the substrate that has reached the B position, a timekeeping section that measures elapsed time when the A sensor and the B sensor detect the presence of the substrate in this order, and an abnormality detection unit that photographs the substrate that has reached the C position, and detects presence or absence of an abnormality in transport of the substrate based on the elapsed time measured by the timekeeping section and an image obtained by the photographing.