Abstract: A substrate processing apparatus configured to process a combined substrate in which a first substrate and a second substrate are stacked on top of each other includes a substrate holder configured to hold the combined substrate; a laser radiating unit configured to radiate laser light to a laser absorbing film in a pulse shape; a moving mechanism configured to move the substrate holder and the laser radiating unit relative to each other; and a controller configured to control the laser radiating unit and the moving mechanism. The controller performs, based on a thickness of the laser absorbing film, a control of selecting a position of a separation surface between the first substrate and the second substrate from one of a position between the first substrate and the laser absorbing film or a position between the a separation facilitating film and the second substrate.

Abstract: A substrate processing apparatus configured to process a combined substrate in which a first substrate, an interface layer including at least a laser absorbing film, and a second substrate are stacked on top of each other includes a substrate holder configured to hold the combined substrate; an interface laser radiating unit configured to radiate laser light to the laser absorbing film in a pulse shape; a moving mechanism configured to move the substrate holder and the interface laser radiating unit relative to each other; and a controller. The controller performs a control of acquiring information of the interface layer formed in the combined substrate, and a control of setting, based on the acquired information of the interface layer, a bonding interface having a weakest adhesive strength among bonding interfaces in the interface layer as a separation interface between the first substrate and the second substrate.

Abstract: A drive device (9) drivably controls linear solenoid valves (SL1 to SL5) by inputting respective drive signals to one-side ends (5a) of the linear solenoid valves (SL1 to SL5) via a connector (Co) and wires (Ha). Other-side ends (5b) of the linear solenoid valves (SL1 to SL5) are connected to respective wires (56). The wires (56) are connected to the connector (Co) while being integrally commonalized by the common wire (57). This allows reducing the number of ground terminals gt of the connector (Co), whereby the connector (Co) can be downsized.

Abstract: A drive device includes: a first current path that has a high-side MOSFET; a second current path that has a low-side MOSFET; and a third current path connected to the other end portion of a coil and positioned between the first current path and the second current path. The drive device further includes: PWM drive circuits that generate a drive signal through PWM control; and an overcurrent detection circuit that detects that an overcurrent has flowed through the current paths. It is possible to precisely detect the occurrence of a battery short circuit and a ground short circuit by detecting which of the first current path and the second current path an overcurrent has flowed through.

Abstract: Provided is a device for detecting a low-pressure state of a predetermined tire, comprising an index value calculation unit, a resonance frequency calculation unit and a low-pressure detection unit. The index value calculation unit calculates a low-pressure index value from wheel speed information of front and rear tires, the low-pressure index value being obtained by comparing rotation speeds of the front and rear tires. The resonance frequency calculation unit calculates a resonance frequency from wheel speed information of a tire. The low-pressure detection unit eliminates an influence of an imposed load on a vehicle and detects the low-pressure state of the predetermined tire based on: a predetermined parameter that indicates a linear relationship between the resonance frequency and the low-pressure index value under a low-pressure condition of the predetermined tire; the low-pressure index value thus calculated; and the resonance frequency thus calculated.

Abstract: A drive device (9) drivably controls linear solenoid valves (SL1 to SL5) by inputting respective drive signals to one-side ends (5a) of the linear solenoid valves (SL1 to SL5) via a connector (Co) and wires (Ha). Other-side ends (5b) of the linear solenoid valves (SL1 to SL5) are connected to respective wires (56). The wires (56) are connected to the connector (Co) while being integrally commonalized by the common wire (57). This allows reducing the number of ground terminals gt of the connector (Co), whereby the connector (Co) can be downsized.

Abstract: A drive device includes: a first current path that has a high-side MOSFET; a second current path that has a low-side MOSFET; and a third current path connected to the other end portion of a coil and positioned between the first current path and the second current path. The drive device further includes: PWM drive circuits that generate a drive signal through PWM control; and an overcurrent detection circuit that detects that an overcurrent has flowed through the current paths. It is possible to precisely detect the occurrence of a battery short circuit and a ground short circuit by detecting which of the first current path and the second current path an overcurrent has flowed through.

Abstract: Provided is a device for detecting a low-pressure state of a predetermined tire, comprising an index value calculation unit, a resonance frequency calculation unit and a low-pressure detection unit. The index value calculation unit calculates a low-pressure index value from wheel speed information of front and rear tires, the low-pressure index value being obtained by comparing rotation speeds of the front and rear tires. The resonance frequency calculation unit calculates a resonance frequency from wheel speed information of a tire. The low-pressure detection unit eliminates an influence of an imposed load on a vehicle and detects the low-pressure state of the predetermined tire based on: a predetermined parameter that indicates a linear relationship between the resonance frequency and the low-pressure index value under a low-pressure condition of the predetermined tire; the low-pressure index value thus calculated; and the resonance frequency thus calculated.

Abstract: A controller of an electromagnetic valve driving circuit include a switching element connected to an electromagnetic valve solenoid, a cutoff circuit for cutting off a connection between a power supply and the switching element, and a current detecting unit for detecting a current flowing in the solenoid. The controller includes an abnormality diagnosing unit for outputting a cutoff command to the cutoff circuit for cutting off the connection between the power supply and the switching element, and outputting a switching command causing the switching element to perform a switching operation when a predetermined diagnosis condition is satisfied, and determining that the cutoff circuit normally operates when the solenoid current is less than a threshold value and determining that the cutoff circuit operates abnormally when the solenoid current is greater than or equal to the threshold value while outputting the cutoff command and the switching command.

Abstract: A controller of an electromagnetic valve driving circuit include a switching element connected to an electromagnetic valve solenoid, a cutoff circuit for cutting off a connection between a power supply and the switching element, and a current detecting unit for detecting a current flowing in the solenoid. The controller includes an abnormality diagnosing unit for outputting a cutoff command to the cutoff circuit for cutting off the connection between the power supply and the switching element, and outputting a switching command causing the switching element to perform a switching operation when a predetermined diagnosis condition is satisfied, and determining that the cutoff circuit normally operates when the solenoid current is less than a threshold value and determining that the cutoff circuit operates abnormally when the solenoid current is greater than or equal to the threshold value while outputting the cutoff command and the switching command.