Abstract: A semiconductor inspection device inspects a semiconductor device to determine whether the semiconductor device is good or bad. The semiconductor inspection device has a semiconductor inspection unit including first to M-th semiconductor inspection circuits (M: an integer not smaller than 2). The first to M-th semiconductor inspection circuits are configured to perform inspections on the semiconductor device for first to M-th inspection items, respectively. The first to M-th inspection items are different from each other. The semiconductor inspection device also includes a tester for receiving outputs from the first to M-th inspection circuits, respectively, to judge whether the semiconductor device passes or fails for each of the first to M-th inspection items. The tester further judges whether the semiconductor device is good or not based on the judgment results for the first to M-th inspection items.

Abstract: A semiconductor inspection circuit on which a semiconductor device is set in inspecting whether the semiconductor is good or bad is provided with semiconductor inspection circuit units from the first to the M-th (M: an integer not smaller than 2) for each inspecting the semiconductor device in terms of inspection items (inspection processes), which are different from each other, and judges the semiconductor device in terms of the inspection items from the first to the M-th in accordance with the inspection outputs outputted from the semiconductor inspection circuit units from the first to the M-th to obtain judgment results from the first to the M-th.