Abstract: The present invention provides an optical deflector capable of reducing a temperature drift of a strain gauge due to a temperature gradient, and detecting with high accuracy an angular displacement of a mirror surface. The optical deflector includes a movable plate, two fixed portions which are disposed at an outer side of the movable plate, two elastic supporting members which are disposed to be substantially symmetric about a center line of the movable plate, and which connect the movable plate and the two fixed portions, an angular-displacement detecting portion having a Wheatston bridge as a measuring portion which includes two active resistors, and two reference resistors, and detects an angular displacement of the movable plate, and at least one resistor element is provided on the elastic supporting portion. All of the four resistor elements are in an isothermal characteristics area.

Abstract: A deformable mirror includes a deformable section on which a reflecting surface and a COM electrode are formed, a fixing section which fixes the deformable section, a driving and sensing electrode (driving force generating unit) which has a plurality of driving and sensing electrodes provided facing the COM electrode, and which drives the deformable section by applying an electric potential difference between the COM electrode and the driving and sensing electrode, and a capacitance detecting circuit which detects simultaneously a plurality of capacitances between the COM electrode and the driving and sensing electrode.

Abstract: An optical switch of the present invention includes at least one input optical fiber, output optical fibers, at least one movable mirror for directing a light beam from the input optical fiber selectively to one of the output optical fibers, and at least one shutter for appropriately intercepting the light beam traveling toward the movable mirror from the input optical fiber. A direction of the movable mirror is changeable, and the direction of the movable mirror is changed to switch the output optical fiber that combines with the light beam reflected by the movable mirror. The shutter intercepts the light beam traveling toward the movable mirror while the direction of the movable mirror is changed.

Abstract: A deformable mirror includes a deformable section in which, a reflecting surface is formed, a fixing section which fixes an outer periphery of the deformable section, a GND electrode which is formed on the deformable section, a drive electrode which is provided facing the GND electrode, and a driving-signal source which deforms the deformable section by an electric voltage applied between the GND electrode and the drive electrode. The deformable mirror is sealed such that a pressure inside to be lower than an atmospheric pressure, and is provided with a capacitance detecting circuit which detects a change in response characteristics of the deformable section associated with a pressure change of a sealed-inside.

Abstract: An optical switch of the present invention includes at least one input optical fiber, output optical fibers, at least one movable mirror for directing a light beam from the input optical fiber selectively to one of the output optical fibers, and at least one shutter for appropriately intercepting the light beam traveling toward the movable mirror from the input optical fiber. A direction of the movable mirror is changeable, and the direction of the movable mirror is changed to switch the output optical fiber that combines with the light beam reflected by the movable mirror. The shutter intercepts the light beam traveling toward the movable mirror while the direction of the movable mirror is changed.

Abstract: An optical switch includes an input optical fiber, an output optical fiber, a grating which performs spectral separation of an optical signal to a plurality of optical signals having different wavelengths, a plurality of movable mirrors, each reflecting an optical light subjected to spectral separation, and directing the optical light appropriately to the input fiber, and each of the movable mirrors can be inclined, a mirror-angle detector which detects an angle of inclination of each of the movable mirrors, a table which associates a wavelength number which identifies the optical signals of the plurality of wavelengths, and an output-destination number which identifies the input optical fiber or the output optical fiber, with the angle of inclination of each movable mirror, and a control circuit which performs a feed-back control such that an angle of inclination AD which is output from the table and an output from the mirror-angle detector match.

Abstract: An optical switch includes a plurality of light inputting members, a plurality of light outputting members, an optical coupling member which couples light to the light inputting members and the light outputting members, an optical path changing member which changes an optical path from the light inputting members up to the light outputting members, an optical path shielding member which can take a first position which shields collectively all optical paths from the light inputting members up to the light outputting members and a second position which allows light to pass through the optical path, a first driving circuit which drives the optical path changing member, and a second driving circuit which drives the optical path shielding member.

Abstract: A deformable mirror includes a deformable section on which a reflecting surface and a COM electrode are formed, a fixing section which fixes the deformable section, a driving and sensing electrode (driving force generating unit) which has a plurality of driving and sensing electrodes provided facing the COM electrode, and which drives the deformable section by applying an electric potential difference between the COM electrode and the driving and sensing electrode, and a capacitance detecting circuit which detects simultaneously a plurality of capacitances between the COM electrode and the driving and sensing electrode.

Abstract: An optical switch of the present invention includes at least one input optical fiber, output optical fibers, at least one movable mirror for directing a light beam from the input optical fiber selectively to one of the output optical fibers, and at least one shutter for appropriately intercepting the light beam traveling toward the movable mirror from the input optical fiber. A direction of the movable mirror is changeable, and the direction of the movable mirror is changed to switch the output optical fiber that combines with the light beam reflected by the movable mirror. The shutter intercepts the light beam traveling toward the movable mirror while the direction of the movable mirror is changed.

Abstract: A deformable mirror includes a deformable section in which, a reflecting surface is formed, a fixing section which fixes an outer periphery of the deformable section, a GND electrode which is formed on the deformable section, a drive electrode which is provided facing the GND electrode, and a driving-signal source which deforms the deformable section by an electric voltage applied between the GND electrode and the drive electrode. The deformable mirror is sealed such that a pressure inside to be lower than an atmospheric pressure, and is provided with a capacitance detecting circuit which detects a change in response characteristics of the deformable section associated with a pressure change of a sealed-inside.

Abstract: An optical switch includes an input optical fiber, an output optical fiber, a grating which performs spectral separation of an optical signal to a plurality of optical signals having different wavelengths, a plurality of movable mirrors, each reflecting an optical light subjected to spectral separation, and directing the optical light appropriately to the input fiber, and each of the movable mirrors can be inclined, a mirror-angle detector which detects an angle of inclination of each of the movable mirrors, a table which associates a wavelength number which identifies the optical signals of the plurality of wavelengths, and an output-destination number which identifies the input optical fiber or the output optical fiber, with the angle of inclination of each movable mirror, and a control circuit which performs a feed-back control such that an angle of inclination AD which is output from the table and an output from the mirror-angle detector match.

Abstract: A deformable mirror has a first deforming portion that has a reflection surface, a second deforming portion surrounding the first deforming portion and has lower mechanical stiffness than that of the first deforming portion, a fixing portion fixing a peripheral portion of the second deforming portion, deformer for acting on the first deforming portion to deform the first deforming portion and second deforming portion, and restrictor for restricting deformation in a main deforming direction of a portion of the first deforming portion that is outside an operation region of the deformer.

Abstract: A light deflector comprises a first movable plate having a reflective surface, fixing portions, a pair of second movable plates located between the first movable plate and the fixing portions, a pair of first elastic members supporting the first movable plate so as to allow it to oscillate with respect to the second movable plates, a pair of second elastic members supporting the second movable plates so as to allow them to oscillate with respect to the fixing portions, and an actuator to oscillate the first movable plate. Oscillation axis of the first elastic members and oscillation axis of the second elastic members are located on the same axis. Stiffness of the second elastic members against oscillation is lower than stiffness of the first elastic members against oscillation.

Abstract: An optical switch includes a plurality of light inputting members, a plurality of light outputting members, an optical coupling member which couples light to the light inputting members and the light outputting members, an optical path changing member which changes an optical path from the light inputting members up to the light outputting members, an optical path shielding member which can take a first position which shields collectively all optical paths from the light inputting members up to the light outputting members and a second position which allows light to pass through the optical path, a first driving circuit which drives the optical path changing member, and a second driving circuit which drives the optical path shielding member.

Abstract: The present invention provides an optical deflector which is capable of reducing a temperature drift of a strain gauge due to a temperature gradient, and detecting with high accuracy an angular displacement of a mirror surface. The optical deflector which deflects light includes a movable plate, two fixed portions which are disposed at an outer side of the movable plate, two elastic supporting members which are disposed such that the elastic supporting members are substantially symmetric about a center line of the movable plate, and which connect the movable plate and the two fixed portions, an angular-displacement detecting portion having a Wheatston bridge as a measuring portion which includes two active resistors, and two reference resistors, and detects an angular displacement of the movable plate, and at least one resistor element, such as the two active resistors are provided on the elastic supporting portion.

Abstract: A deformable mirror has a first deforming portion that has a reflection surface, a second deforming portion surrounding the first deforming portion and has lower mechanical stiffness than that of the first deforming portion, a fixing portion fixing a peripheral portion of the second deforming portion, deformer for acting on the first deforming portion to deform the first deforming portion and second deforming portion, and restrictor for restricting deformation in a main deforming direction of a portion of the first deforming portion that is outside an operation region of the deformer.

Abstract: The present invention is directed to a photoconductive switch module. The photoconductive switch module comprises a first substrate having light-emitting elements, and a second substrate having photoconductive switch elements, whose number is equal to that of the light-emitting elements. The light-emitting elements face the photoconductive switch elements, so that the photoconductive switch elements are turned on/off in accordance with lighting/extinction of the light-emitting elements. The photoconductive switch module further comprises a third substrate arranged between the first substrate and the second substrate. The third substrate has through holes, whose number is equal to that of the light-emitting elements. Each through hole is positioned between a light-emitting element and a photoconductive switch element facing each other. Drive light emitted from each light-emitting element travels to the photoconductive switch element via the through hole.

Abstract: A light intercepting device includes a movable portion allowed to swing about a support portion as a torsional axis, a shielding portion provided at an end portion of the movable portion in a direction perpendicular to the torsional axis, a driving wiring provided on the movable portion, and a magnetic field generator to apply a magnetic field to at least a part of the driving wiring in a direction perpendicular to the driving wiring. A position of the shielding portion is changed by power supply control for the driving wiring to control transmission and interception of space light.

Abstract: A light deflector comprises a first movable plate having a reflective surface, fixing portions, a pair of second movable plates located between the first movable plate and the fixing portions, a pair of first elastic members supporting the first movable plate so as to allow it to oscillate with respect to the second movable plates, a pair of second elastic members supporting the second movable plates so as to allow them to oscillate with respect to the fixing portions, and an actuator to oscillate the first movable plate. Oscillation axis of the first elastic members and oscillation axis of the second elastic members are located on the same axis. Stiffness of the second elastic members against oscillation is lower than stiffness of the first elastic members against oscillation.

Abstract: A light intercepting device includes a movable portion allowed to swing about a support portion as a torsional axis, a shielding portion provided at an end portion of the movable portion in a direction perpendicular to the torsional axis, a driving wiring provided on the movable portion, and a magnetic field generator to apply a magnetic field to at least a part of the driving wiring in a direction perpendicular to the driving wiring. A position of the shielding portion is changed by power supply control for the driving wiring to control transmission and interception of space light.