Patents by Inventor Kenzou MURATA

Kenzou MURATA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heating apparatus, substrate heating apparatus, and method of manufacturing semiconductor device
    Patent number: 10056273
    Abstract: A heating apparatus includes a heater, an electron reflection plate, a filament arranged between the heater and the electron reflection plate, a heating power supply configured to supply an AC voltage between a first terminal and a second terminal of the filament to emit thermoelectrons from the filament, an acceleration power supply configured to supply an acceleration voltage between the filament and the heater, and a resistor arranged so as to form a path which connects the electron reflection plate and the heating power supply.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: August 21, 2018
    Assignee: Canon Anelva Corporation
    Inventors: Masao Sasaki, Kazutoshi Yoshibayashi, Kenji Sato, Kenzou Murata
  • HEATING APPARATUS, SUBSTRATE HEATING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20180082865
    Abstract: A heating apparatus includes a heater, an electron reflection plate, a filament arranged between the heater and the electron reflection plate, a heating power supply configured to supply an AC voltage between a first terminal and a second terminal of the filament to emit thermoelectrons from the filament, an acceleration power supply configured to supply an acceleration voltage between the filament and the heater, and a resistor arranged so as to form a path which connects the electron reflection plate and the heating power supply.
    Type: Application
    Filed: September 6, 2017
    Publication date: March 22, 2018
    Applicant: CANON ANELVA CORPORATION
    Inventors: Masao SASAKI, Kazutoshi YOSHIBAYASHI, Kenji SATO, Kenzou MURATA